Design and experimental validation of an ultra-precision Abbe-compliant linear encoder-based position measurement system.
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| Title: | Design and experimental validation of an ultra-precision Abbe-compliant linear encoder-based position measurement system. |
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| Authors: | Bosmans, Niels1 niels.bosmans@kuleuven.be, Qian, Jun1, Reynaerts, Dominiek1 |
| Source: | Precision Engineering. Jan2017, Vol. 47, p197-211. 15p. |
| Subjects: | Statistical accuracy, Machine tool path, Capacitive sensors, Workpieces, Coordinate measuring machines |
| Abstract: | The design and development of an Abbe-compliant linear encoder-based measurement system for position measurement with a targeted 20 nm uncertainty ( k = 2) in machine tools and CMMs is presented. It consists of a linear scale and a capacitive sensor, mounted in line on an interface which is guided in the scale's measurement direction and driven by a linear motor based on the output signal of the capacitive sensor. The capacitive sensor measures the displacement of a target surface on the workpiece table. The functional point, which is the center of a tool or touch probe, is always aligned with the scale and capacitive sensor such that this configuration is compliant with the Abbe principle. Thermal stability is achieved by the application of a thermal center between the scale and capacitive sensor at the tip of the latter, which prevents both components to drift apart. Based on this concept, a prototype of a one-DOF measurement system was developed for a measurement range of 120 mm, together with an experimental setup aimed at verifying the reproducibility of the system for changing ambient conditions of ±0.5 °C and ±5%rh and the repeatability during tracking of a target surface over a short period of time. These experiments have shown that the measurement uncertainty of the one-DOF system is below 29 nm with a 95% confidence level. [ABSTRACT FROM AUTHOR] |
| Copyright of Precision Engineering is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.) | |
| Database: | Engineering Source |
| FullText | Text: Availability: 0 |
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| Header | DbId: egs DbLabel: Engineering Source An: 119418255 AccessLevel: 6 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| Items | – Name: Title Label: Title Group: Ti Data: Design and experimental validation of an ultra-precision Abbe-compliant linear encoder-based position measurement system. – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AR" term="%22Bosmans%2C+Niels%22">Bosmans, Niels</searchLink><relatesTo>1</relatesTo><i> niels.bosmans@kuleuven.be</i><br /><searchLink fieldCode="AR" term="%22Qian%2C+Jun%22">Qian, Jun</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Reynaerts%2C+Dominiek%22">Reynaerts, Dominiek</searchLink><relatesTo>1</relatesTo> – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22Precision+Engineering%22">Precision Engineering</searchLink>. Jan2017, Vol. 47, p197-211. 15p. – Name: Subject Label: Subjects Group: Su Data: <searchLink fieldCode="DE" term="%22Statistical+accuracy%22">Statistical accuracy</searchLink><br /><searchLink fieldCode="DE" term="%22Machine+tool+path%22">Machine tool path</searchLink><br /><searchLink fieldCode="DE" term="%22Capacitive+sensors%22">Capacitive sensors</searchLink><br /><searchLink fieldCode="DE" term="%22Workpieces%22">Workpieces</searchLink><br /><searchLink fieldCode="DE" term="%22Coordinate+measuring+machines%22">Coordinate measuring machines</searchLink> – Name: Abstract Label: Abstract Group: Ab Data: The design and development of an Abbe-compliant linear encoder-based measurement system for position measurement with a targeted 20 nm uncertainty ( k = 2) in machine tools and CMMs is presented. It consists of a linear scale and a capacitive sensor, mounted in line on an interface which is guided in the scale's measurement direction and driven by a linear motor based on the output signal of the capacitive sensor. The capacitive sensor measures the displacement of a target surface on the workpiece table. The functional point, which is the center of a tool or touch probe, is always aligned with the scale and capacitive sensor such that this configuration is compliant with the Abbe principle. Thermal stability is achieved by the application of a thermal center between the scale and capacitive sensor at the tip of the latter, which prevents both components to drift apart. Based on this concept, a prototype of a one-DOF measurement system was developed for a measurement range of 120 mm, together with an experimental setup aimed at verifying the reproducibility of the system for changing ambient conditions of ±0.5 °C and ±5%rh and the repeatability during tracking of a target surface over a short period of time. These experiments have shown that the measurement uncertainty of the one-DOF system is below 29 nm with a 95% confidence level. [ABSTRACT FROM AUTHOR] – Name: AbstractSuppliedCopyright Label: Group: Ab Data: <i>Copyright of Precision Engineering is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.) |
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| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1016/j.precisioneng.2016.08.005 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 15 StartPage: 197 Subjects: – SubjectFull: Statistical accuracy Type: general – SubjectFull: Machine tool path Type: general – SubjectFull: Capacitive sensors Type: general – SubjectFull: Workpieces Type: general – SubjectFull: Coordinate measuring machines Type: general Titles: – TitleFull: Design and experimental validation of an ultra-precision Abbe-compliant linear encoder-based position measurement system. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Bosmans, Niels – PersonEntity: Name: NameFull: Qian, Jun – PersonEntity: Name: NameFull: Reynaerts, Dominiek IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 01 Text: Jan2017 Type: published Y: 2017 Identifiers: – Type: issn-print Value: 01416359 Numbering: – Type: volume Value: 47 Titles: – TitleFull: Precision Engineering Type: main |
| ResultId | 1 |
