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Study on ductile mode machining of single-crystal silicon by mechanical machining.

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Title: Study on ductile mode machining of single-crystal silicon by mechanical machining.
Authors: Choi, Dae-Hee1,2, Lee, Je-Ryung2, Kang, Na-Ri3, Je, Tae-Jin1,2, Kim, Ju-Young3 juyoung@unist.ac.kr, Jeon, Eun-chae1,2 jeonec@kimm.re.kr
Source: International Journal of Machine Tools & Manufacture. Feb2017, Vol. 113, p1-9. 9p.
Subjects: Ductile fractures, Single crystals, Mechanical properties of metals, Photolithography, Optical industry
Abstract: Nano patterns on single-crystal silicon are generally manufactured by photolithography, which can form limited cross-sectional shapes such as U-shapes or rectangular channels. Though V-shaped patterns are widely used in the optical industries because they concentrate light, they are challenging to manufacture by conventional photolithography. Mechanical machining is useful in manufacturing various kinds of cross-sectional shapes including V-shapes with various apex angles, but is hard to apply to single-crystal silicon due to its brittle fracture. Here we suggest a novel way of mechanical machining of single-crystal silicon that suppresses brittle fracture below the critical point (the ductile-brittle transition point) as determined by nano-scratch testing. We find that the first drop point of the cutting force corresponds to a critical point and define the critical forces as the thrust force and the cutting force at the critical point. The critical forces are varied by the applied force per unit length, which is the possibility that the cutting tool interacts with mechanically weak atomic bonds. When the applied force per unit length is zero (a general condition of mechanical machining), the cutting speed does not affect the variation of the critical forces or the quality of the machined pattern. Based on analysis of the experimental results, we suggest that the single-crystal silicon can be mechanically machined without brittle fracture at high cutting speed if the thrust force is smaller than the critical force of zero applied force per unit length. [ABSTRACT FROM AUTHOR]
Copyright of International Journal of Machine Tools & Manufacture is the property of Pergamon Press - An Imprint of Elsevier Science and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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Header DbId: egs
DbLabel: Engineering Source
An: 120296989
AccessLevel: 6
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Study on ductile mode machining of single-crystal silicon by mechanical machining.
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  Data: <searchLink fieldCode="AR" term="%22Choi%2C+Dae-Hee%22">Choi, Dae-Hee</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AR" term="%22Lee%2C+Je-Ryung%22">Lee, Je-Ryung</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AR" term="%22Kang%2C+Na-Ri%22">Kang, Na-Ri</searchLink><relatesTo>3</relatesTo><br /><searchLink fieldCode="AR" term="%22Je%2C+Tae-Jin%22">Je, Tae-Jin</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AR" term="%22Kim%2C+Ju-Young%22">Kim, Ju-Young</searchLink><relatesTo>3</relatesTo><i> juyoung@unist.ac.kr</i><br /><searchLink fieldCode="AR" term="%22Jeon%2C+Eun-chae%22">Jeon, Eun-chae</searchLink><relatesTo>1,2</relatesTo><i> jeonec@kimm.re.kr</i>
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  Data: <searchLink fieldCode="JN" term="%22International+Journal+of+Machine+Tools+%26+Manufacture%22">International Journal of Machine Tools & Manufacture</searchLink>. Feb2017, Vol. 113, p1-9. 9p.
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  Data: <searchLink fieldCode="DE" term="%22Ductile+fractures%22">Ductile fractures</searchLink><br /><searchLink fieldCode="DE" term="%22Single+crystals%22">Single crystals</searchLink><br /><searchLink fieldCode="DE" term="%22Mechanical+properties+of+metals%22">Mechanical properties of metals</searchLink><br /><searchLink fieldCode="DE" term="%22Photolithography%22">Photolithography</searchLink><br /><searchLink fieldCode="DE" term="%22Optical+industry%22">Optical industry</searchLink>
– Name: Abstract
  Label: Abstract
  Group: Ab
  Data: Nano patterns on single-crystal silicon are generally manufactured by photolithography, which can form limited cross-sectional shapes such as U-shapes or rectangular channels. Though V-shaped patterns are widely used in the optical industries because they concentrate light, they are challenging to manufacture by conventional photolithography. Mechanical machining is useful in manufacturing various kinds of cross-sectional shapes including V-shapes with various apex angles, but is hard to apply to single-crystal silicon due to its brittle fracture. Here we suggest a novel way of mechanical machining of single-crystal silicon that suppresses brittle fracture below the critical point (the ductile-brittle transition point) as determined by nano-scratch testing. We find that the first drop point of the cutting force corresponds to a critical point and define the critical forces as the thrust force and the cutting force at the critical point. The critical forces are varied by the applied force per unit length, which is the possibility that the cutting tool interacts with mechanically weak atomic bonds. When the applied force per unit length is zero (a general condition of mechanical machining), the cutting speed does not affect the variation of the critical forces or the quality of the machined pattern. Based on analysis of the experimental results, we suggest that the single-crystal silicon can be mechanically machined without brittle fracture at high cutting speed if the thrust force is smaller than the critical force of zero applied force per unit length. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of International Journal of Machine Tools & Manufacture is the property of Pergamon Press - An Imprint of Elsevier Science and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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      – Type: doi
        Value: 10.1016/j.ijmachtools.2016.10.006
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      – Code: eng
        Text: English
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      Pagination:
        PageCount: 9
        StartPage: 1
    Subjects:
      – SubjectFull: Ductile fractures
        Type: general
      – SubjectFull: Single crystals
        Type: general
      – SubjectFull: Mechanical properties of metals
        Type: general
      – SubjectFull: Photolithography
        Type: general
      – SubjectFull: Optical industry
        Type: general
    Titles:
      – TitleFull: Study on ductile mode machining of single-crystal silicon by mechanical machining.
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            NameFull: Choi, Dae-Hee
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            NameFull: Lee, Je-Ryung
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            NameFull: Kang, Na-Ri
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            NameFull: Je, Tae-Jin
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            NameFull: Kim, Ju-Young
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            NameFull: Jeon, Eun-chae
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            – D: 01
              M: 02
              Text: Feb2017
              Type: published
              Y: 2017
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              Value: 08906955
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              Value: 113
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            – TitleFull: International Journal of Machine Tools & Manufacture
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