Effect of the Fabrication Parameters of the Nanosphere Lithography Method on the Properties of the Deposited Au-Ag Nanoparticle Arrays.

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Title: Effect of the Fabrication Parameters of the Nanosphere Lithography Method on the Properties of the Deposited Au-Ag Nanoparticle Arrays.
Authors: Jing Liu1 jingliu@jmu.edu.cn, Chaoyang Chen1 xx002@jmu.edu.cn, Guangsong Yang1 gsyang@jmu.edu.cn, Yushan Chen1 chenys@jmu.edu.cn, Cheng-Fu Yang2 cfyang@nuk.edu.tw
Source: Materials (1996-1944). Apr2017, Vol. 10 Issue 4, p381. 15p. 7 Black and White Photographs, 4 Diagrams, 1 Chart.
Subjects: Lithography techniques, Fabrication (Manufacturing), Nanoparticles analysis, Surface plasmon resonance, Nanoelectromechanical systems
Abstract: The nanosphere lithography (NSL) method can be developed to deposit the Au-Ag triangle hexagonal nanoparticle arrays for the generation of localized surface plasmon resonance. Previously, we have found that the parameters used to form the NSL masks and the physical methods required to deposit the Au-Ag thin films had large effects on the geometry properties of the nanoparticle arrays. Considering this, the different parameters used to grow the Au-Ag triangle hexagonal nanoparticle arrays were investigated. A single-layer NSL mask was formed by using self-assembly nano-scale polystyrene (PS) nanospheres with an average radius of 265 nm. At first, the concentration of the nano-scale PS nanospheres in the solution was set at 6 wt %. Two coating methods, drop-coating and spin-coating, were used to coat the nano-scale PS nanospheres as a single-layer NSL mask. From the observations of scanning electronic microscopy (SEM), we found that the matrixes of the PS nanosphere masks fabricated by using the drop-coating method were more uniform and exhibited a smaller gap than those fabricated by the spin-coating method. Next, the drop-coating method was used to form the single-layer NSL mask and the concentration of nano-scale PS nanospheres in a solution that was changed from 4 to 10 wt %, for further study. The SEM images showed that when the concentrations of PS nanospheres in the solution were 6 and 8 wt %, the matrixes of the PS nanosphere masks were more uniform than those of 4 and 10 wt %. The effects of the one-side lifting angle of substrates and the vaporization temperature for the solvent of one-layer self-assembly PS nanosphere thin films, were also investigated. Finally, the concentration of the nano-scale PS nanospheres in the solution was set at 8 wt % to form the PS nanosphere masks by the drop-coating method. Three different physical deposition methods, including thermal evaporation, radio-frequency magnetron sputtering, and e-gun deposition, were used to deposit the Au-Ag triangle hexagonal periodic nanoparticle arrays. The SEM images showed that as the single-layer PS nanosphere mask was well controlled, the thermal evaporation could deposit the Au-Ag triangle hexagonal nanoparticle arrays with a higher quality than the other two methods. [ABSTRACT FROM AUTHOR]
Copyright of Materials (1996-1944) is the property of MDPI and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
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  Data: Effect of the Fabrication Parameters of the Nanosphere Lithography Method on the Properties of the Deposited Au-Ag Nanoparticle Arrays.
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  Data: <searchLink fieldCode="AR" term="%22Jing+Liu%22">Jing Liu</searchLink><relatesTo>1</relatesTo><i> jingliu@jmu.edu.cn</i><br /><searchLink fieldCode="AR" term="%22Chaoyang+Chen%22">Chaoyang Chen</searchLink><relatesTo>1</relatesTo><i> xx002@jmu.edu.cn</i><br /><searchLink fieldCode="AR" term="%22Guangsong+Yang%22">Guangsong Yang</searchLink><relatesTo>1</relatesTo><i> gsyang@jmu.edu.cn</i><br /><searchLink fieldCode="AR" term="%22Yushan+Chen%22">Yushan Chen</searchLink><relatesTo>1</relatesTo><i> chenys@jmu.edu.cn</i><br /><searchLink fieldCode="AR" term="%22Cheng-Fu+Yang%22">Cheng-Fu Yang</searchLink><relatesTo>2</relatesTo><i> cfyang@nuk.edu.tw</i>
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  Data: <searchLink fieldCode="JN" term="%22Materials+%281996-1944%29%22">Materials (1996-1944)</searchLink>. Apr2017, Vol. 10 Issue 4, p381. 15p. 7 Black and White Photographs, 4 Diagrams, 1 Chart.
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  Data: <searchLink fieldCode="DE" term="%22Lithography+techniques%22">Lithography techniques</searchLink><br /><searchLink fieldCode="DE" term="%22Fabrication+%28Manufacturing%29%22">Fabrication (Manufacturing)</searchLink><br /><searchLink fieldCode="DE" term="%22Nanoparticles+analysis%22">Nanoparticles analysis</searchLink><br /><searchLink fieldCode="DE" term="%22Surface+plasmon+resonance%22">Surface plasmon resonance</searchLink><br /><searchLink fieldCode="DE" term="%22Nanoelectromechanical+systems%22">Nanoelectromechanical systems</searchLink>
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  Data: The nanosphere lithography (NSL) method can be developed to deposit the Au-Ag triangle hexagonal nanoparticle arrays for the generation of localized surface plasmon resonance. Previously, we have found that the parameters used to form the NSL masks and the physical methods required to deposit the Au-Ag thin films had large effects on the geometry properties of the nanoparticle arrays. Considering this, the different parameters used to grow the Au-Ag triangle hexagonal nanoparticle arrays were investigated. A single-layer NSL mask was formed by using self-assembly nano-scale polystyrene (PS) nanospheres with an average radius of 265 nm. At first, the concentration of the nano-scale PS nanospheres in the solution was set at 6 wt %. Two coating methods, drop-coating and spin-coating, were used to coat the nano-scale PS nanospheres as a single-layer NSL mask. From the observations of scanning electronic microscopy (SEM), we found that the matrixes of the PS nanosphere masks fabricated by using the drop-coating method were more uniform and exhibited a smaller gap than those fabricated by the spin-coating method. Next, the drop-coating method was used to form the single-layer NSL mask and the concentration of nano-scale PS nanospheres in a solution that was changed from 4 to 10 wt %, for further study. The SEM images showed that when the concentrations of PS nanospheres in the solution were 6 and 8 wt %, the matrixes of the PS nanosphere masks were more uniform than those of 4 and 10 wt %. The effects of the one-side lifting angle of substrates and the vaporization temperature for the solvent of one-layer self-assembly PS nanosphere thin films, were also investigated. Finally, the concentration of the nano-scale PS nanospheres in the solution was set at 8 wt % to form the PS nanosphere masks by the drop-coating method. Three different physical deposition methods, including thermal evaporation, radio-frequency magnetron sputtering, and e-gun deposition, were used to deposit the Au-Ag triangle hexagonal periodic nanoparticle arrays. The SEM images showed that as the single-layer PS nanosphere mask was well controlled, the thermal evaporation could deposit the Au-Ag triangle hexagonal nanoparticle arrays with a higher quality than the other two methods. [ABSTRACT FROM AUTHOR]
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  Group: Ab
  Data: <i>Copyright of Materials (1996-1944) is the property of MDPI and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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        Value: 10.3390/ma10040381
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      – Code: eng
        Text: English
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        PageCount: 15
        StartPage: 381
    Subjects:
      – SubjectFull: Lithography techniques
        Type: general
      – SubjectFull: Fabrication (Manufacturing)
        Type: general
      – SubjectFull: Nanoparticles analysis
        Type: general
      – SubjectFull: Surface plasmon resonance
        Type: general
      – SubjectFull: Nanoelectromechanical systems
        Type: general
    Titles:
      – TitleFull: Effect of the Fabrication Parameters of the Nanosphere Lithography Method on the Properties of the Deposited Au-Ag Nanoparticle Arrays.
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            NameFull: Jing Liu
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            NameFull: Chaoyang Chen
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            NameFull: Guangsong Yang
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            NameFull: Yushan Chen
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            NameFull: Cheng-Fu Yang
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              M: 04
              Text: Apr2017
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              Y: 2017
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