Bibliographic Details
| Title: |
Development of compact Cs corrector for desktop electron microscope. |
| Authors: |
Chang, Wei-Yu1, Chen, Fu-Rong1 fchen1@me.com |
| Source: |
Ultramicroscopy. Aug2017, Vol. 179, p94-99. 6p. |
| Subjects: |
Electron microscopes, Scanning transmission electron microscopy, Permanent magnets, Astigmatism (Optics), Magnetic fields |
| Abstract: |
The desktop Electron Microscopes (desktop EMs) have been commercialized in the recent years, offering a spatial resolution around 1 nm in scanning-transmission mode in a routine operation. For the purpose of further improvement in spatial resolution and signal / noise, one may need an aberration corrector with a compact form in order to fit into a desktop EM. In this paper, the permanent magnets with tunable coil are implemented as a transfer lens doublet to realize a compact hexapole corrector for a desktop EM. It will be shown that, with a proper design of permanent magnet transfer lens doublet and hexapole lens, we can generate a negative Cs and avoid the second-order axial astigmatism to reduce the final spot size at the sample plane to be better than 0.5 nm for a field emission source. To fulfill with the required condition of a hexapole corrector, a tunable lens is implemented to adjust the magnetic field for compensating the practical error from the permanent magnet. [ABSTRACT FROM AUTHOR] |
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| Database: |
Engineering Source |
