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Development of compact Cs corrector for desktop electron microscope.

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Title: Development of compact Cs corrector for desktop electron microscope.
Authors: Chang, Wei-Yu1, Chen, Fu-Rong1 fchen1@me.com
Source: Ultramicroscopy. Aug2017, Vol. 179, p94-99. 6p.
Subjects: Electron microscopes, Scanning transmission electron microscopy, Permanent magnets, Astigmatism (Optics), Magnetic fields
Abstract: The desktop Electron Microscopes (desktop EMs) have been commercialized in the recent years, offering a spatial resolution around 1 nm in scanning-transmission mode in a routine operation. For the purpose of further improvement in spatial resolution and signal / noise, one may need an aberration corrector with a compact form in order to fit into a desktop EM. In this paper, the permanent magnets with tunable coil are implemented as a transfer lens doublet to realize a compact hexapole corrector for a desktop EM. It will be shown that, with a proper design of permanent magnet transfer lens doublet and hexapole lens, we can generate a negative Cs and avoid the second-order axial astigmatism to reduce the final spot size at the sample plane to be better than 0.5 nm for a field emission source. To fulfill with the required condition of a hexapole corrector, a tunable lens is implemented to adjust the magnetic field for compensating the practical error from the permanent magnet. [ABSTRACT FROM AUTHOR]
Copyright of Ultramicroscopy is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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Header DbId: egs
DbLabel: Engineering Source
An: 123372054
AccessLevel: 6
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
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  Data: Development of compact Cs corrector for desktop electron microscope.
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  Data: <searchLink fieldCode="AR" term="%22Chang%2C+Wei-Yu%22">Chang, Wei-Yu</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Chen%2C+Fu-Rong%22">Chen, Fu-Rong</searchLink><relatesTo>1</relatesTo><i> fchen1@me.com</i>
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  Data: <searchLink fieldCode="JN" term="%22Ultramicroscopy%22">Ultramicroscopy</searchLink>. Aug2017, Vol. 179, p94-99. 6p.
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  Data: <searchLink fieldCode="DE" term="%22Electron+microscopes%22">Electron microscopes</searchLink><br /><searchLink fieldCode="DE" term="%22Scanning+transmission+electron+microscopy%22">Scanning transmission electron microscopy</searchLink><br /><searchLink fieldCode="DE" term="%22Permanent+magnets%22">Permanent magnets</searchLink><br /><searchLink fieldCode="DE" term="%22Astigmatism+%28Optics%29%22">Astigmatism (Optics)</searchLink><br /><searchLink fieldCode="DE" term="%22Magnetic+fields%22">Magnetic fields</searchLink>
– Name: Abstract
  Label: Abstract
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  Data: The desktop Electron Microscopes (desktop EMs) have been commercialized in the recent years, offering a spatial resolution around 1 nm in scanning-transmission mode in a routine operation. For the purpose of further improvement in spatial resolution and signal / noise, one may need an aberration corrector with a compact form in order to fit into a desktop EM. In this paper, the permanent magnets with tunable coil are implemented as a transfer lens doublet to realize a compact hexapole corrector for a desktop EM. It will be shown that, with a proper design of permanent magnet transfer lens doublet and hexapole lens, we can generate a negative Cs and avoid the second-order axial astigmatism to reduce the final spot size at the sample plane to be better than 0.5 nm for a field emission source. To fulfill with the required condition of a hexapole corrector, a tunable lens is implemented to adjust the magnetic field for compensating the practical error from the permanent magnet. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Ultramicroscopy is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.1016/j.ultramic.2017.04.009
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      – Code: eng
        Text: English
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      Pagination:
        PageCount: 6
        StartPage: 94
    Subjects:
      – SubjectFull: Electron microscopes
        Type: general
      – SubjectFull: Scanning transmission electron microscopy
        Type: general
      – SubjectFull: Permanent magnets
        Type: general
      – SubjectFull: Astigmatism (Optics)
        Type: general
      – SubjectFull: Magnetic fields
        Type: general
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      – TitleFull: Development of compact Cs corrector for desktop electron microscope.
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            NameFull: Chang, Wei-Yu
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              Text: Aug2017
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              Y: 2017
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              Value: 179
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