Development and Production of Array Barrier Detectors at SCD.

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Title: Development and Production of Array Barrier Detectors at SCD.
Authors: Klipstein, P.1 philip_k@scd.co.il, Avnon, E.1, Benny, Y.1, Berkowicz, E.1, Cohen, Y.1, Dobromislin, R.1, Fraenkel, R.1, Gershon, G.1, Glozman, A.1, Hojman, E.1, Ilan, E.1, Karni, Y.1, Klin, O.1, Kodriano, Y.1, Krasovitsky, L.1, Langof, L.1, Lukomsky, I.1, Nevo, I.1, Nitzani, M.1, Pivnik, I.1
Source: Journal of Electronic Materials. Sep2017, Vol. 46 Issue 9, p5386-5393. 8p.
Subjects: Infrared array detectors, Mercury cadmium tellurides, Quantum chemistry, Quantum efficiency, Semiconductor devices, Focal plane arrays sensors
Abstract: XB n or XB p barrier detectors exhibit diffusion-limited dark currents comparable with mercury cadmium telluride Rule-07 and high quantum efficiencies. In 2011, SemiConductor Devices (SCD) introduced 'HOT Pelican D', a 640 × 512/15- μm pitch InAsSb/AlSbAs XB n mid-wave infrared (MWIR) detector with a 4.2- μm cut-off and an operating temperature of ∼150 K. Its low power (∼3 W), high pixel operability (>99.5%) and long mean time to failure make HOT Pelican D a highly reliable integrated detector-cooler product with a low size, weight and power. More recently, 'HOT Hercules' was launched with a 1280 × 1024/15- μm format and similar advantages. A 3-megapixel, 10- μm pitch version ('HOT Blackbird') is currently completing development. For long-wave infrared applications, SCD's 640 × 512/15- μm pitch 'Pelican-D LW' XB p type II superlattice (T2SL) detector has a ∼9.3- μm cut-off wavelength. The detector contains InAs/GaSb and InAs/AlSb T2SLs, and is fabricated into focal plane array (FPA) detectors using standard production processes including hybridization to a digital silicon read-out integrated circuit (ROIC), glue underfill and substrate thinning. The ROIC has been designed so that the complete detector closely follows the interfaces of SCD's MWIR Pelican-D detector family. The Pelican-D LW FPA has a quantum efficiency of ∼50%, and operates at 77 K with a pixel operability of >99% and noise equivalent temperature difference of 13 mK at 30 Hz and F/2.7. [ABSTRACT FROM AUTHOR]
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Database: Engineering Source
Description
Abstract:XB n or XB p barrier detectors exhibit diffusion-limited dark currents comparable with mercury cadmium telluride Rule-07 and high quantum efficiencies. In 2011, SemiConductor Devices (SCD) introduced 'HOT Pelican D', a 640 × 512/15- μm pitch InAsSb/AlSbAs XB n mid-wave infrared (MWIR) detector with a 4.2- μm cut-off and an operating temperature of ∼150 K. Its low power (∼3 W), high pixel operability (>99.5%) and long mean time to failure make HOT Pelican D a highly reliable integrated detector-cooler product with a low size, weight and power. More recently, 'HOT Hercules' was launched with a 1280 × 1024/15- μm format and similar advantages. A 3-megapixel, 10- μm pitch version ('HOT Blackbird') is currently completing development. For long-wave infrared applications, SCD's 640 × 512/15- μm pitch 'Pelican-D LW' XB p type II superlattice (T2SL) detector has a ∼9.3- μm cut-off wavelength. The detector contains InAs/GaSb and InAs/AlSb T2SLs, and is fabricated into focal plane array (FPA) detectors using standard production processes including hybridization to a digital silicon read-out integrated circuit (ROIC), glue underfill and substrate thinning. The ROIC has been designed so that the complete detector closely follows the interfaces of SCD's MWIR Pelican-D detector family. The Pelican-D LW FPA has a quantum efficiency of ∼50%, and operates at 77 K with a pixel operability of >99% and noise equivalent temperature difference of 13 mK at 30 Hz and F/2.7. [ABSTRACT FROM AUTHOR]
ISSN:03615235
DOI:10.1007/s11664-017-5590-x