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Design and Sensitivity Improvement of CMOS-MEMS Scanning Microwave Microscopes.

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Title: Design and Sensitivity Improvement of CMOS-MEMS Scanning Microwave Microscopes.
Authors: Azizi, Mostafa1, Mansour, Raafat R.1
Source: IEEE Transactions on Microwave Theory & Techniques. Aug2017, Vol. 65 Issue 8, p2749-2761. 13p.
Subjects: Atomic force microscopes, CMOS integrated circuits, Microelectromechanical systems, Scanning probe microscopy, Coaxial cables
Abstract: In this paper, we present the performance and imaging results of an integrated single-chip CMOS-microelectromechanical systems (MEMS) scanning microwave microscope (SMM). A systematic analysis for sensitivity improvement is described in detail. We first explain why it is important to have high sensitivity for this type of microscope and then propose a systematic method to analyze and design the entire structure for better sensitivity. For this, accurate lumped models are derived for each section of the system and comparisons are made between different designs. Furthermore, a new concept based on the quality factor of the individual sections is described to give the designer a tool to improve the sensitivity of individual sections without the need to simulate or model the entire system. A high-sensitivity measurement system is also explained. Finally some measurement results are presented. While the analysis presented in this paper is for CMOS-MEMS SMM, it is applicable to any type of SMM. [ABSTRACT FROM AUTHOR]
Copyright of IEEE Transactions on Microwave Theory & Techniques is the property of IEEE and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
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  Data: Design and Sensitivity Improvement of CMOS-MEMS Scanning Microwave Microscopes.
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  Data: <searchLink fieldCode="DE" term="%22Atomic+force+microscopes%22">Atomic force microscopes</searchLink><br /><searchLink fieldCode="DE" term="%22CMOS+integrated+circuits%22">CMOS integrated circuits</searchLink><br /><searchLink fieldCode="DE" term="%22Microelectromechanical+systems%22">Microelectromechanical systems</searchLink><br /><searchLink fieldCode="DE" term="%22Scanning+probe+microscopy%22">Scanning probe microscopy</searchLink><br /><searchLink fieldCode="DE" term="%22Coaxial+cables%22">Coaxial cables</searchLink>
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  Data: In this paper, we present the performance and imaging results of an integrated single-chip CMOS-microelectromechanical systems (MEMS) scanning microwave microscope (SMM). A systematic analysis for sensitivity improvement is described in detail. We first explain why it is important to have high sensitivity for this type of microscope and then propose a systematic method to analyze and design the entire structure for better sensitivity. For this, accurate lumped models are derived for each section of the system and comparisons are made between different designs. Furthermore, a new concept based on the quality factor of the individual sections is described to give the designer a tool to improve the sensitivity of individual sections without the need to simulate or model the entire system. A high-sensitivity measurement system is also explained. Finally some measurement results are presented. While the analysis presented in this paper is for CMOS-MEMS SMM, it is applicable to any type of SMM. [ABSTRACT FROM AUTHOR]
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  Data: <i>Copyright of IEEE Transactions on Microwave Theory & Techniques is the property of IEEE and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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        Value: 10.1109/TMTT.2017.2671359
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      – Code: eng
        Text: English
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        PageCount: 13
        StartPage: 2749
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      – SubjectFull: Atomic force microscopes
        Type: general
      – SubjectFull: CMOS integrated circuits
        Type: general
      – SubjectFull: Microelectromechanical systems
        Type: general
      – SubjectFull: Scanning probe microscopy
        Type: general
      – SubjectFull: Coaxial cables
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      – TitleFull: Design and Sensitivity Improvement of CMOS-MEMS Scanning Microwave Microscopes.
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              Text: Aug2017
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