Fabrication of periodic nanostructures using dynamic plowing lithography with the tip of an atomic force microscope.
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| Title: | Fabrication of periodic nanostructures using dynamic plowing lithography with the tip of an atomic force microscope. |
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| Authors: | He, Yang1,2 hyang@hit.edu.cn, Yan, Yongda1,2 yanyd_hit@aliyun.com, Geng, Yanquan1,2 gengyanquan@hit.edu.cn, Brousseau, Emmanuel3 BrousseauE@cardiff.ac.uk |
| Source: | Applied Surface Science. Jan2018 Part A, Vol. 427, p1076-1083. 8p. |
| Subjects: | Nanostructures, Lithography techniques, Atomic force microscopes, Cantilevers, Raman scattering |
| Abstract: | The fabrication of periodic nanostructures with a fine control of their dimensions is performed on poly(methyl methacrylate) (PMMA) thin films using an atomic force microscope technique called dynamic plowing lithography (DPL). Different scratching directions are investigated first when generating single grooves with DPL. In particular, the depth, the width and the periodicity of the machined grooves as well the height of the pile-up, formed on the side of the grooves, are assessed. It was found that these features are not significantly affected by the scratching direction, except when processing took place in a direction away from the cantilever probe and parallel to its main axis. For a given scratching direction, arrays of regular grooves are then obtained by controlling the feed, i.e. the distance between two machining lines. A scan-scratch tip trace is also used to reduce processing time and tip wear. However, irregular patterns are created when combining two layers oriented at different angles and where each layer defines an array of grooves. Thus, a “combination writing” method was implemented to fabricate arrays of grooves with a well-defined wavelength of 30 nm, which was twice the feed value utilized. Checkerboard, diamond-shaped, and hexagonal nanodots were also fabricated. These were obtained by using the combination writing method and by varying the orientation and the number of layers. The density of the nanodots achieved could be as high as 1.9 × 10 9 nanodots per mm 2 . [ABSTRACT FROM AUTHOR] |
| Copyright of Applied Surface Science is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.) | |
| Database: | Engineering Source |
| FullText | Text: Availability: 0 |
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| Header | DbId: egs DbLabel: Engineering Source An: 125805767 AccessLevel: 6 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| Items | – Name: Title Label: Title Group: Ti Data: Fabrication of periodic nanostructures using dynamic plowing lithography with the tip of an atomic force microscope. – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AR" term="%22He%2C+Yang%22">He, Yang</searchLink><relatesTo>1,2</relatesTo><i> hyang@hit.edu.cn</i><br /><searchLink fieldCode="AR" term="%22Yan%2C+Yongda%22">Yan, Yongda</searchLink><relatesTo>1,2</relatesTo><i> yanyd_hit@aliyun.com</i><br /><searchLink fieldCode="AR" term="%22Geng%2C+Yanquan%22">Geng, Yanquan</searchLink><relatesTo>1,2</relatesTo><i> gengyanquan@hit.edu.cn</i><br /><searchLink fieldCode="AR" term="%22Brousseau%2C+Emmanuel%22">Brousseau, Emmanuel</searchLink><relatesTo>3</relatesTo><i> BrousseauE@cardiff.ac.uk</i> – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22Applied+Surface+Science%22">Applied Surface Science</searchLink>. Jan2018 Part A, Vol. 427, p1076-1083. 8p. – Name: Subject Label: Subjects Group: Su Data: <searchLink fieldCode="DE" term="%22Nanostructures%22">Nanostructures</searchLink><br /><searchLink fieldCode="DE" term="%22Lithography+techniques%22">Lithography techniques</searchLink><br /><searchLink fieldCode="DE" term="%22Atomic+force+microscopes%22">Atomic force microscopes</searchLink><br /><searchLink fieldCode="DE" term="%22Cantilevers%22">Cantilevers</searchLink><br /><searchLink fieldCode="DE" term="%22Raman+scattering%22">Raman scattering</searchLink> – Name: Abstract Label: Abstract Group: Ab Data: The fabrication of periodic nanostructures with a fine control of their dimensions is performed on poly(methyl methacrylate) (PMMA) thin films using an atomic force microscope technique called dynamic plowing lithography (DPL). Different scratching directions are investigated first when generating single grooves with DPL. In particular, the depth, the width and the periodicity of the machined grooves as well the height of the pile-up, formed on the side of the grooves, are assessed. It was found that these features are not significantly affected by the scratching direction, except when processing took place in a direction away from the cantilever probe and parallel to its main axis. For a given scratching direction, arrays of regular grooves are then obtained by controlling the feed, i.e. the distance between two machining lines. A scan-scratch tip trace is also used to reduce processing time and tip wear. However, irregular patterns are created when combining two layers oriented at different angles and where each layer defines an array of grooves. Thus, a “combination writing” method was implemented to fabricate arrays of grooves with a well-defined wavelength of 30 nm, which was twice the feed value utilized. Checkerboard, diamond-shaped, and hexagonal nanodots were also fabricated. These were obtained by using the combination writing method and by varying the orientation and the number of layers. The density of the nanodots achieved could be as high as 1.9 × 10 9 nanodots per mm 2 . [ABSTRACT FROM AUTHOR] – Name: AbstractSuppliedCopyright Label: Group: Ab Data: <i>Copyright of Applied Surface Science is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.) |
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| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1016/j.apsusc.2017.08.134 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 8 StartPage: 1076 Subjects: – SubjectFull: Nanostructures Type: general – SubjectFull: Lithography techniques Type: general – SubjectFull: Atomic force microscopes Type: general – SubjectFull: Cantilevers Type: general – SubjectFull: Raman scattering Type: general Titles: – TitleFull: Fabrication of periodic nanostructures using dynamic plowing lithography with the tip of an atomic force microscope. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: He, Yang – PersonEntity: Name: NameFull: Yan, Yongda – PersonEntity: Name: NameFull: Geng, Yanquan – PersonEntity: Name: NameFull: Brousseau, Emmanuel IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 01 Text: Jan2018 Part A Type: published Y: 2018 Identifiers: – Type: issn-print Value: 01694332 Numbering: – Type: volume Value: 427 Titles: – TitleFull: Applied Surface Science Type: main |
| ResultId | 1 |
