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Design and characterization of a monolithic CMOS-MEMS mutually injection-locked oscillator for differential resonant sensing.

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Title: Design and characterization of a monolithic CMOS-MEMS mutually injection-locked oscillator for differential resonant sensing.
Authors: Prache, Pierre1,2 pierre.prache@centralesupelec.fr, Juillard, Jérôme1 jerome.juillard@centralesupelec.fr, Ferreira, Pietro Maris1, Barniol, Núria2 nuria.barniol@uab.cat, Riverola, Marti2
Source: Sensors & Actuators A: Physical. Jan2018, Vol. 269, p160-170. 11p.
Subjects: Complementary metal oxide semiconductor design & construction, Injection locked oscillators, Systems on a chip, Optimal designs (Statistics), Microelectromechanical systems
Abstract: This paper presents a proof of concept of a differential sensor based on the phase-difference of two injection-locked MEMS resonators, strongly coupled through their actuation voltages by a digital mixer. For the first time the feasibility of a fully monolithically co-integrated CMOS-MEMS differential resonant sensor, exploiting the capabilities of the injection-locked synchronization is proved. The principle of the system is first presented, from which optimal design guidelines are derived. The design of the different blocks of the system is then addressed. Our experimental results demonstrate the sensitivity enhancement of the proposed solution, as predicted by theory, and partial thermal drift rejection in a 70 °C range. The simulated and experimental results highlight the critical points of the system design, on which the emphasis of this article is placed. [ABSTRACT FROM AUTHOR]
Copyright of Sensors & Actuators A: Physical is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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DbLabel: Engineering Source
An: 127031480
AccessLevel: 6
PubType: Academic Journal
PubTypeId: academicJournal
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  Data: Design and characterization of a monolithic CMOS-MEMS mutually injection-locked oscillator for differential resonant sensing.
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  Data: <searchLink fieldCode="JN" term="%22Sensors+%26+Actuators+A%3A+Physical%22">Sensors & Actuators A: Physical</searchLink>. Jan2018, Vol. 269, p160-170. 11p.
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  Data: <searchLink fieldCode="DE" term="%22Complementary+metal+oxide+semiconductor+design+%26+construction%22">Complementary metal oxide semiconductor design & construction</searchLink><br /><searchLink fieldCode="DE" term="%22Injection+locked+oscillators%22">Injection locked oscillators</searchLink><br /><searchLink fieldCode="DE" term="%22Systems+on+a+chip%22">Systems on a chip</searchLink><br /><searchLink fieldCode="DE" term="%22Optimal+designs+%28Statistics%29%22">Optimal designs (Statistics)</searchLink><br /><searchLink fieldCode="DE" term="%22Microelectromechanical+systems%22">Microelectromechanical systems</searchLink>
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  Data: This paper presents a proof of concept of a differential sensor based on the phase-difference of two injection-locked MEMS resonators, strongly coupled through their actuation voltages by a digital mixer. For the first time the feasibility of a fully monolithically co-integrated CMOS-MEMS differential resonant sensor, exploiting the capabilities of the injection-locked synchronization is proved. The principle of the system is first presented, from which optimal design guidelines are derived. The design of the different blocks of the system is then addressed. Our experimental results demonstrate the sensitivity enhancement of the proposed solution, as predicted by theory, and partial thermal drift rejection in a 70 °C range. The simulated and experimental results highlight the critical points of the system design, on which the emphasis of this article is placed. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
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  Data: <i>Copyright of Sensors & Actuators A: Physical is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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        Value: 10.1016/j.sna.2017.11.025
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      – Code: eng
        Text: English
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        PageCount: 11
        StartPage: 160
    Subjects:
      – SubjectFull: Complementary metal oxide semiconductor design & construction
        Type: general
      – SubjectFull: Injection locked oscillators
        Type: general
      – SubjectFull: Systems on a chip
        Type: general
      – SubjectFull: Optimal designs (Statistics)
        Type: general
      – SubjectFull: Microelectromechanical systems
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      – TitleFull: Design and characterization of a monolithic CMOS-MEMS mutually injection-locked oscillator for differential resonant sensing.
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            NameFull: Prache, Pierre
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              M: 01
              Text: Jan2018
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              Y: 2018
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