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Improved XPS analysis by visual inspection of the survey spectrum.

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Title: Improved XPS analysis by visual inspection of the survey spectrum.
Authors: Tougaard, Sven1 svt@sdu.dk
Source: Surface & Interface Analysis: SIA. Jun2018, Vol. 50 Issue 6, p657-666. 10p.
Subjects: X-ray photoelectron spectroscopy, Electron cloud effect, Attenuation coefficients, Positron annihilation, Molecular dynamics
Abstract: In this paper, we have revisited a well-known issue in quantitative X-ray photoelectron spectroscopy (XPS) analysis: when quantitative XPS analysis is based solely on measured peak intensities, this can give rather confusing and misleading results. The problem is caused by peak intensity attenuation with photoelectron distance traveled in the sample and is an issue for samples where the atomic concentration varies substantially over the outermost ~5 nm. This is however the most significant depth range for many of the practical applications of nano-structures which is today of increasing technological importance. We discuss 3 different methods to correct for the attenuation effect and their limitations. It is then pointed out how one can, by visually comparing observed peak shapes to a set of model spectra, often get a rough idea of the atom depth distribution in the surface region of the sample. This provides a practical tool to supplement the information obtained with XPS analysis based on peak intensities and chemical state information obtained from high-resolution spectra. [ABSTRACT FROM AUTHOR]
Copyright of Surface & Interface Analysis: SIA is the property of Wiley-Blackwell and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
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  Data: Improved XPS analysis by visual inspection of the survey spectrum.
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  Data: <searchLink fieldCode="DE" term="%22X-ray+photoelectron+spectroscopy%22">X-ray photoelectron spectroscopy</searchLink><br /><searchLink fieldCode="DE" term="%22Electron+cloud+effect%22">Electron cloud effect</searchLink><br /><searchLink fieldCode="DE" term="%22Attenuation+coefficients%22">Attenuation coefficients</searchLink><br /><searchLink fieldCode="DE" term="%22Positron+annihilation%22">Positron annihilation</searchLink><br /><searchLink fieldCode="DE" term="%22Molecular+dynamics%22">Molecular dynamics</searchLink>
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  Data: In this paper, we have revisited a well-known issue in quantitative X-ray photoelectron spectroscopy (XPS) analysis: when quantitative XPS analysis is based solely on measured peak intensities, this can give rather confusing and misleading results. The problem is caused by peak intensity attenuation with photoelectron distance traveled in the sample and is an issue for samples where the atomic concentration varies substantially over the outermost ~5 nm. This is however the most significant depth range for many of the practical applications of nano-structures which is today of increasing technological importance. We discuss 3 different methods to correct for the attenuation effect and their limitations. It is then pointed out how one can, by visually comparing observed peak shapes to a set of model spectra, often get a rough idea of the atom depth distribution in the surface region of the sample. This provides a practical tool to supplement the information obtained with XPS analysis based on peak intensities and chemical state information obtained from high-resolution spectra. [ABSTRACT FROM AUTHOR]
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  Data: <i>Copyright of Surface & Interface Analysis: SIA is the property of Wiley-Blackwell and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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    Identifiers:
      – Type: doi
        Value: 10.1002/sia.6456
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      – Code: eng
        Text: English
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        PageCount: 10
        StartPage: 657
    Subjects:
      – SubjectFull: X-ray photoelectron spectroscopy
        Type: general
      – SubjectFull: Electron cloud effect
        Type: general
      – SubjectFull: Attenuation coefficients
        Type: general
      – SubjectFull: Positron annihilation
        Type: general
      – SubjectFull: Molecular dynamics
        Type: general
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      – TitleFull: Improved XPS analysis by visual inspection of the survey spectrum.
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            – D: 01
              M: 06
              Text: Jun2018
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              Y: 2018
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            – TitleFull: Surface & Interface Analysis: SIA
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