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Hydrogen gettering of titanium[sbnd]palladium/palladium nanocomposite films synthesized by cosputtering and vacuum-annealing.

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Title: Hydrogen gettering of titanium[sbnd]palladium/palladium nanocomposite films synthesized by cosputtering and vacuum-annealing.
Authors: Lim, Hyo-Ryoung1, Eom, Nu Si A1,2, Cho, Jeong-Ho3, Cho, Hong-Baek1, Choa, Yong-Ho1,4 choa15@hanyang.ac.kr
Source: International Journal of Hydrogen Energy. Oct2018, Vol. 43 Issue 43, p19990-19997. 8p.
Subjects: Hydrogen, Gettering, Titanium composites, Nanofilms, Sputtering (Physics), Annealing of metals, Effect of temperature on alloys
Abstract: Abstract Nano-engineered composite film, prepared by the combination of titanium (Ti) nanoparticles with surrounding layers of palladium (Pd), has been suggested as a high performance hydrogen (H 2) getter. Uniform Ti Pd film covered by a 35-nm-thick Pd layer was deposited on a silicon wafer via cosputtering and post-vacuum-annealing. As the annealing temperature increased from 200 to 400 °C, amorphous alloy and nano-aggregates were observed, and efficient structural modulation occurred at 400 °C, where dewetting of Pd cover layer from the getter surface was observed. This led to the enhancement of the chemisorption capacity of the 400oC-annealed sample, two-times higher than that of the 300oC-annealed sample. Abrupt change in residual gases, which typically come from a bonding process, can be mitigated by minimizing the gas transfer distance through the dewetting of the cover layer; since Ti nanoparticles surrounded by Pd exist independently of each other in the gettering layer, external H 2 gas molecules can be continuously adsorbed onto still-unreacted Ti particles by passing through the dewetted channels in the Pd cover layer. This concept demonstrates a pathway towards a useful synthetic approach for high-performance thin-film getters with high adsorption capacity, fast gettering rate and good device compatibility. Highlights • Nanostructured Ti Pd/Pd film was synthesized by cosputtering and post-vacuum-annealing for H 2 getter. • Nano-aggregates in getter film and dewetting of Pd cover layer were observed after annealing at 400 °C. • H 2 adsorption isotherms showed high performance chemisorption capacity of nano-engineered Ti Pd/Pd film. • Ti nanoparticles surrounded by Pd exist independently of each other, and thus can continuously adsorb H 2. [ABSTRACT FROM AUTHOR]
Copyright of International Journal of Hydrogen Energy is the property of Pergamon Press - An Imprint of Elsevier Science and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Hydrogen gettering of titanium[sbnd]palladium/palladium nanocomposite films synthesized by cosputtering and vacuum-annealing.
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  Data: <searchLink fieldCode="AR" term="%22Lim%2C+Hyo-Ryoung%22">Lim, Hyo-Ryoung</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Eom%2C+Nu+Si+A%22">Eom, Nu Si A</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AR" term="%22Cho%2C+Jeong-Ho%22">Cho, Jeong-Ho</searchLink><relatesTo>3</relatesTo><br /><searchLink fieldCode="AR" term="%22Cho%2C+Hong-Baek%22">Cho, Hong-Baek</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Choa%2C+Yong-Ho%22">Choa, Yong-Ho</searchLink><relatesTo>1,4</relatesTo><i> choa15@hanyang.ac.kr</i>
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  Data: <searchLink fieldCode="JN" term="%22International+Journal+of+Hydrogen+Energy%22">International Journal of Hydrogen Energy</searchLink>. Oct2018, Vol. 43 Issue 43, p19990-19997. 8p.
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  Data: <searchLink fieldCode="DE" term="%22Hydrogen%22">Hydrogen</searchLink><br /><searchLink fieldCode="DE" term="%22Gettering%22">Gettering</searchLink><br /><searchLink fieldCode="DE" term="%22Titanium+composites%22">Titanium composites</searchLink><br /><searchLink fieldCode="DE" term="%22Nanofilms%22">Nanofilms</searchLink><br /><searchLink fieldCode="DE" term="%22Sputtering+%28Physics%29%22">Sputtering (Physics)</searchLink><br /><searchLink fieldCode="DE" term="%22Annealing+of+metals%22">Annealing of metals</searchLink><br /><searchLink fieldCode="DE" term="%22Effect+of+temperature+on+alloys%22">Effect of temperature on alloys</searchLink>
– Name: Abstract
  Label: Abstract
  Group: Ab
  Data: Abstract Nano-engineered composite film, prepared by the combination of titanium (Ti) nanoparticles with surrounding layers of palladium (Pd), has been suggested as a high performance hydrogen (H 2) getter. Uniform Ti Pd film covered by a 35-nm-thick Pd layer was deposited on a silicon wafer via cosputtering and post-vacuum-annealing. As the annealing temperature increased from 200 to 400 °C, amorphous alloy and nano-aggregates were observed, and efficient structural modulation occurred at 400 °C, where dewetting of Pd cover layer from the getter surface was observed. This led to the enhancement of the chemisorption capacity of the 400oC-annealed sample, two-times higher than that of the 300oC-annealed sample. Abrupt change in residual gases, which typically come from a bonding process, can be mitigated by minimizing the gas transfer distance through the dewetting of the cover layer; since Ti nanoparticles surrounded by Pd exist independently of each other in the gettering layer, external H 2 gas molecules can be continuously adsorbed onto still-unreacted Ti particles by passing through the dewetted channels in the Pd cover layer. This concept demonstrates a pathway towards a useful synthetic approach for high-performance thin-film getters with high adsorption capacity, fast gettering rate and good device compatibility. Highlights • Nanostructured Ti Pd/Pd film was synthesized by cosputtering and post-vacuum-annealing for H 2 getter. • Nano-aggregates in getter film and dewetting of Pd cover layer were observed after annealing at 400 °C. • H 2 adsorption isotherms showed high performance chemisorption capacity of nano-engineered Ti Pd/Pd film. • Ti nanoparticles surrounded by Pd exist independently of each other, and thus can continuously adsorb H 2. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of International Journal of Hydrogen Energy is the property of Pergamon Press - An Imprint of Elsevier Science and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1016/j.ijhydene.2018.09.017
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 8
        StartPage: 19990
    Subjects:
      – SubjectFull: Hydrogen
        Type: general
      – SubjectFull: Gettering
        Type: general
      – SubjectFull: Titanium composites
        Type: general
      – SubjectFull: Nanofilms
        Type: general
      – SubjectFull: Sputtering (Physics)
        Type: general
      – SubjectFull: Annealing of metals
        Type: general
      – SubjectFull: Effect of temperature on alloys
        Type: general
    Titles:
      – TitleFull: Hydrogen gettering of titanium[sbnd]palladium/palladium nanocomposite films synthesized by cosputtering and vacuum-annealing.
        Type: main
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          Name:
            NameFull: Lim, Hyo-Ryoung
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            NameFull: Eom, Nu Si A
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            NameFull: Cho, Jeong-Ho
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            NameFull: Cho, Hong-Baek
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            NameFull: Choa, Yong-Ho
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            – D: 25
              M: 10
              Text: Oct2018
              Type: published
              Y: 2018
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              Value: 43
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              Value: 43
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            – TitleFull: International Journal of Hydrogen Energy
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