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A New Pellistor-Like Gas Sensor Based on Micromachined CMOS Transistor.

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Title: A New Pellistor-Like Gas Sensor Based on Micromachined CMOS Transistor.
Authors: Nemirovsky, Yael, Stolyarova, Sara, Blank, Tanya, Bar-Lev, Sharon, Svetlitza, Alexander, Zviagintsev, Alex, Brouk, Igor
Source: IEEE Transactions on Electron Devices. Dec2018, Vol. 65 Issue 12, p5494-5498. 5p.
Subjects: Complementary metal oxide semiconductors, Transistors, Gas detectors, Tungsten, High temperatures, Metal oxide semiconductors
Abstract: A new generation of thermal sensors based on a suspended thermal transistor MOS (TMOS), fabricated in the standard CMOS-SOI process, released by postetching, has been recently developed. One of the important features of TMOS is its high responsivity due to the transistor built-in amplification and subthreshold operation enabling a wide range of battery applications. This paper focuses on a new gas sensor, dubbed GMOS, based on the TMOS. The GMOS is a catalytic gas sensor (pellistor-like), and as such detects combustible gases in air. The CMOS-SOI technology combined with tungsten metallization enables operation at very high temperatures (450 °C was tested). The sensors and readout are processed with the same CMOS-SOI technology. Accordingly, the GMOS sensor, processed in low-cost CMOS-SOI technology, promises to become the widely accepted gas sensing approach for mobile applications, including wearables, smart homes, as well as smartphones. [ABSTRACT FROM AUTHOR]
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Database: Engineering Source
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Abstract:A new generation of thermal sensors based on a suspended thermal transistor MOS (TMOS), fabricated in the standard CMOS-SOI process, released by postetching, has been recently developed. One of the important features of TMOS is its high responsivity due to the transistor built-in amplification and subthreshold operation enabling a wide range of battery applications. This paper focuses on a new gas sensor, dubbed GMOS, based on the TMOS. The GMOS is a catalytic gas sensor (pellistor-like), and as such detects combustible gases in air. The CMOS-SOI technology combined with tungsten metallization enables operation at very high temperatures (450 °C was tested). The sensors and readout are processed with the same CMOS-SOI technology. Accordingly, the GMOS sensor, processed in low-cost CMOS-SOI technology, promises to become the widely accepted gas sensing approach for mobile applications, including wearables, smart homes, as well as smartphones. [ABSTRACT FROM AUTHOR]
ISSN:00189383
DOI:10.1109/TED.2018.2878015