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A New Pellistor-Like Gas Sensor Based on Micromachined CMOS Transistor.

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Title: A New Pellistor-Like Gas Sensor Based on Micromachined CMOS Transistor.
Authors: Nemirovsky, Yael, Stolyarova, Sara, Blank, Tanya, Bar-Lev, Sharon, Svetlitza, Alexander, Zviagintsev, Alex, Brouk, Igor
Source: IEEE Transactions on Electron Devices. Dec2018, Vol. 65 Issue 12, p5494-5498. 5p.
Subjects: Complementary metal oxide semiconductors, Transistors, Gas detectors, Tungsten, High temperatures, Metal oxide semiconductors
Abstract: A new generation of thermal sensors based on a suspended thermal transistor MOS (TMOS), fabricated in the standard CMOS-SOI process, released by postetching, has been recently developed. One of the important features of TMOS is its high responsivity due to the transistor built-in amplification and subthreshold operation enabling a wide range of battery applications. This paper focuses on a new gas sensor, dubbed GMOS, based on the TMOS. The GMOS is a catalytic gas sensor (pellistor-like), and as such detects combustible gases in air. The CMOS-SOI technology combined with tungsten metallization enables operation at very high temperatures (450 °C was tested). The sensors and readout are processed with the same CMOS-SOI technology. Accordingly, the GMOS sensor, processed in low-cost CMOS-SOI technology, promises to become the widely accepted gas sensing approach for mobile applications, including wearables, smart homes, as well as smartphones. [ABSTRACT FROM AUTHOR]
Copyright of IEEE Transactions on Electron Devices is the property of IEEE and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
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  Data: A New Pellistor-Like Gas Sensor Based on Micromachined CMOS Transistor.
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  Data: <searchLink fieldCode="AR" term="%22Nemirovsky%2C+Yael%22">Nemirovsky, Yael</searchLink><br /><searchLink fieldCode="AR" term="%22Stolyarova%2C+Sara%22">Stolyarova, Sara</searchLink><br /><searchLink fieldCode="AR" term="%22Blank%2C+Tanya%22">Blank, Tanya</searchLink><br /><searchLink fieldCode="AR" term="%22Bar-Lev%2C+Sharon%22">Bar-Lev, Sharon</searchLink><br /><searchLink fieldCode="AR" term="%22Svetlitza%2C+Alexander%22">Svetlitza, Alexander</searchLink><br /><searchLink fieldCode="AR" term="%22Zviagintsev%2C+Alex%22">Zviagintsev, Alex</searchLink><br /><searchLink fieldCode="AR" term="%22Brouk%2C+Igor%22">Brouk, Igor</searchLink>
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  Data: <searchLink fieldCode="JN" term="%22IEEE+Transactions+on+Electron+Devices%22">IEEE Transactions on Electron Devices</searchLink>. Dec2018, Vol. 65 Issue 12, p5494-5498. 5p.
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  Data: <searchLink fieldCode="DE" term="%22Complementary+metal+oxide+semiconductors%22">Complementary metal oxide semiconductors</searchLink><br /><searchLink fieldCode="DE" term="%22Transistors%22">Transistors</searchLink><br /><searchLink fieldCode="DE" term="%22Gas+detectors%22">Gas detectors</searchLink><br /><searchLink fieldCode="DE" term="%22Tungsten%22">Tungsten</searchLink><br /><searchLink fieldCode="DE" term="%22High+temperatures%22">High temperatures</searchLink><br /><searchLink fieldCode="DE" term="%22Metal+oxide+semiconductors%22">Metal oxide semiconductors</searchLink>
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  Data: A new generation of thermal sensors based on a suspended thermal transistor MOS (TMOS), fabricated in the standard CMOS-SOI process, released by postetching, has been recently developed. One of the important features of TMOS is its high responsivity due to the transistor built-in amplification and subthreshold operation enabling a wide range of battery applications. This paper focuses on a new gas sensor, dubbed GMOS, based on the TMOS. The GMOS is a catalytic gas sensor (pellistor-like), and as such detects combustible gases in air. The CMOS-SOI technology combined with tungsten metallization enables operation at very high temperatures (450 °C was tested). The sensors and readout are processed with the same CMOS-SOI technology. Accordingly, the GMOS sensor, processed in low-cost CMOS-SOI technology, promises to become the widely accepted gas sensing approach for mobile applications, including wearables, smart homes, as well as smartphones. [ABSTRACT FROM AUTHOR]
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  Data: <i>Copyright of IEEE Transactions on Electron Devices is the property of IEEE and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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        Value: 10.1109/TED.2018.2878015
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        Text: English
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      – SubjectFull: Complementary metal oxide semiconductors
        Type: general
      – SubjectFull: Transistors
        Type: general
      – SubjectFull: Gas detectors
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      – SubjectFull: Tungsten
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      – SubjectFull: High temperatures
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      – TitleFull: A New Pellistor-Like Gas Sensor Based on Micromachined CMOS Transistor.
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              Text: Dec2018
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