APA (7th ed.) Citation

Perret, C., Gourgon, C., Lazzarino, F., Tallal, J., Landis, S., & Pelzer, R. (2004). Characterization of 8-in. wafers printed by nanoimprint lithography. Microelectronic Engineering, 73/74, 172. https://doi.org/10.1016/S0167-9317(04)00094-2

Chicago Style (17th ed.) Citation

Perret, C., C. Gourgon, F. Lazzarino, J. Tallal, S. Landis, and R. Pelzer. "Characterization of 8-in. Wafers Printed by Nanoimprint Lithography." Microelectronic Engineering 73/74 (2004): 172. https://doi.org/10.1016/S0167-9317(04)00094-2.

MLA (9th ed.) Citation

Perret, C., et al. "Characterization of 8-in. Wafers Printed by Nanoimprint Lithography." Microelectronic Engineering, vol. 73/74, 2004, p. 172, https://doi.org/10.1016/S0167-9317(04)00094-2.