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Patterning sub-30 µm liquid metal wires on PDMS substrates via stencil lithography and pre-stretching.

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Bibliographic Details
Title: Patterning sub-30 µm liquid metal wires on PDMS substrates via stencil lithography and pre-stretching.
Authors: Junshan Liu1,2,3 liujs@dlut.edu.cn, Shuling Yang1, Zehan Liu1, Hongji Guo1, Zhe Liu1, Zheng Xu1, Chong Liu1,2, Liding Wang1,2
Source: Journal of Micromechanics & Microengineering. Sep2019, Vol. 29 Issue 9, p1-1. 1p.
Subjects: Liquid metals, Metal castings, Lithography, Strain sensors, Stencil work, Wire
Abstract: Presented is a simple method combining a pre-stretching process with stencil lithography for high-resolution patterning of liquid metal wires on polydimethylsiloxane (PDMS) substrates. The PDMS substrate is pre-stretched to several times its original length before casting liquid metals, it is released and restores back to its original length after casting liquid metals through a stencil mask; hence, the width and spacing of the patterned liquid metal wires decrease simultaneously with the PDMS substrate. The degree to which the width and spacing of liquid metal wires decrease is approximately equal to the times that the PDMS substrate is pre-stretched. An ultraviolet-ozone surface modification method was used to enhance the adhesion between liquid metals and PDMS substrates, and an alternative method based on applying an external electric field was proposed to remove excess liquid metals over the stencil mask. Sub-30 µm liquid metal wires were successfully patterned. As a demonstration, a liquid metal based flexible strain sensor was fabricated, the sensor exhibited excellent stretchability, stability, sensitivity and durability. [ABSTRACT FROM AUTHOR]
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Database: Engineering Source
Description
Abstract:Presented is a simple method combining a pre-stretching process with stencil lithography for high-resolution patterning of liquid metal wires on polydimethylsiloxane (PDMS) substrates. The PDMS substrate is pre-stretched to several times its original length before casting liquid metals, it is released and restores back to its original length after casting liquid metals through a stencil mask; hence, the width and spacing of the patterned liquid metal wires decrease simultaneously with the PDMS substrate. The degree to which the width and spacing of liquid metal wires decrease is approximately equal to the times that the PDMS substrate is pre-stretched. An ultraviolet-ozone surface modification method was used to enhance the adhesion between liquid metals and PDMS substrates, and an alternative method based on applying an external electric field was proposed to remove excess liquid metals over the stencil mask. Sub-30 µm liquid metal wires were successfully patterned. As a demonstration, a liquid metal based flexible strain sensor was fabricated, the sensor exhibited excellent stretchability, stability, sensitivity and durability. [ABSTRACT FROM AUTHOR]
ISSN:13616439
DOI:10.1088/1361-6439/ab2839