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Patterning sub-30 µm liquid metal wires on PDMS substrates via stencil lithography and pre-stretching.

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Title: Patterning sub-30 µm liquid metal wires on PDMS substrates via stencil lithography and pre-stretching.
Authors: Junshan Liu1,2,3 liujs@dlut.edu.cn, Shuling Yang1, Zehan Liu1, Hongji Guo1, Zhe Liu1, Zheng Xu1, Chong Liu1,2, Liding Wang1,2
Source: Journal of Micromechanics & Microengineering. Sep2019, Vol. 29 Issue 9, p1-1. 1p.
Subjects: Liquid metals, Metal castings, Lithography, Strain sensors, Stencil work, Wire
Abstract: Presented is a simple method combining a pre-stretching process with stencil lithography for high-resolution patterning of liquid metal wires on polydimethylsiloxane (PDMS) substrates. The PDMS substrate is pre-stretched to several times its original length before casting liquid metals, it is released and restores back to its original length after casting liquid metals through a stencil mask; hence, the width and spacing of the patterned liquid metal wires decrease simultaneously with the PDMS substrate. The degree to which the width and spacing of liquid metal wires decrease is approximately equal to the times that the PDMS substrate is pre-stretched. An ultraviolet-ozone surface modification method was used to enhance the adhesion between liquid metals and PDMS substrates, and an alternative method based on applying an external electric field was proposed to remove excess liquid metals over the stencil mask. Sub-30 µm liquid metal wires were successfully patterned. As a demonstration, a liquid metal based flexible strain sensor was fabricated, the sensor exhibited excellent stretchability, stability, sensitivity and durability. [ABSTRACT FROM AUTHOR]
Copyright of Journal of Micromechanics & Microengineering is the property of IOP Publishing and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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Header DbId: egs
DbLabel: Engineering Source
An: 137787130
AccessLevel: 6
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Label: Title
  Group: Ti
  Data: Patterning sub-30 µm liquid metal wires on PDMS substrates via stencil lithography and pre-stretching.
– Name: Author
  Label: Authors
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  Data: <searchLink fieldCode="AR" term="%22Junshan+Liu%22">Junshan Liu</searchLink><relatesTo>1,2,3</relatesTo><i> liujs@dlut.edu.cn</i><br /><searchLink fieldCode="AR" term="%22Shuling+Yang%22">Shuling Yang</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Zehan+Liu%22">Zehan Liu</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Hongji+Guo%22">Hongji Guo</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Zhe+Liu%22">Zhe Liu</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Zheng+Xu%22">Zheng Xu</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Chong+Liu%22">Chong Liu</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AR" term="%22Liding+Wang%22">Liding Wang</searchLink><relatesTo>1,2</relatesTo>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Micromechanics+%26+Microengineering%22">Journal of Micromechanics & Microengineering</searchLink>. Sep2019, Vol. 29 Issue 9, p1-1. 1p.
– Name: Subject
  Label: Subjects
  Group: Su
  Data: <searchLink fieldCode="DE" term="%22Liquid+metals%22">Liquid metals</searchLink><br /><searchLink fieldCode="DE" term="%22Metal+castings%22">Metal castings</searchLink><br /><searchLink fieldCode="DE" term="%22Lithography%22">Lithography</searchLink><br /><searchLink fieldCode="DE" term="%22Strain+sensors%22">Strain sensors</searchLink><br /><searchLink fieldCode="DE" term="%22Stencil+work%22">Stencil work</searchLink><br /><searchLink fieldCode="DE" term="%22Wire%22">Wire</searchLink>
– Name: Abstract
  Label: Abstract
  Group: Ab
  Data: Presented is a simple method combining a pre-stretching process with stencil lithography for high-resolution patterning of liquid metal wires on polydimethylsiloxane (PDMS) substrates. The PDMS substrate is pre-stretched to several times its original length before casting liquid metals, it is released and restores back to its original length after casting liquid metals through a stencil mask; hence, the width and spacing of the patterned liquid metal wires decrease simultaneously with the PDMS substrate. The degree to which the width and spacing of liquid metal wires decrease is approximately equal to the times that the PDMS substrate is pre-stretched. An ultraviolet-ozone surface modification method was used to enhance the adhesion between liquid metals and PDMS substrates, and an alternative method based on applying an external electric field was proposed to remove excess liquid metals over the stencil mask. Sub-30 µm liquid metal wires were successfully patterned. As a demonstration, a liquid metal based flexible strain sensor was fabricated, the sensor exhibited excellent stretchability, stability, sensitivity and durability. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Journal of Micromechanics & Microengineering is the property of IOP Publishing and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.1088/1361-6439/ab2839
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      – Code: eng
        Text: English
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        PageCount: 1
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    Subjects:
      – SubjectFull: Liquid metals
        Type: general
      – SubjectFull: Metal castings
        Type: general
      – SubjectFull: Lithography
        Type: general
      – SubjectFull: Strain sensors
        Type: general
      – SubjectFull: Stencil work
        Type: general
      – SubjectFull: Wire
        Type: general
    Titles:
      – TitleFull: Patterning sub-30 µm liquid metal wires on PDMS substrates via stencil lithography and pre-stretching.
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            NameFull: Junshan Liu
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            NameFull: Shuling Yang
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            NameFull: Zehan Liu
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            NameFull: Zhe Liu
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            NameFull: Zheng Xu
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            NameFull: Chong Liu
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            – D: 01
              M: 09
              Text: Sep2019
              Type: published
              Y: 2019
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              Value: 13616439
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              Value: 29
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              Value: 9
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            – TitleFull: Journal of Micromechanics & Microengineering
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