Downscaling of Floating-Gate EEPROM Modules for ASIC Applications.

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Bibliographic Details
Title: Downscaling of Floating-Gate EEPROM Modules for ASIC Applications.
Authors: Shiba, Kazuyoshi1, Kubota, Katsuhiko1
Source: Electronics & Communications in Japan, Part 2: Electronics. Dec92, Vol. 75 Issue 12, p67-76. 10p.
Subjects: Integrated circuits, Read-only memory, Electronic circuits, Scaling laws (Statistical physics), Logic circuits, Computer circuits
Abstract: Downscaling methods of electrically erasable pros grammable ROM (EEPROM) for application-specific integrated circuit (ASIC) applications based on the double-poly floating-gate process were studied. Simple sealing of ASIC and EEPROM modules with the same scaling factor can significantly reduce the time for design and development. Horizontal scaling of the memory cell with unchanged vertical dimensions does not alter the cell performance because the capacitance coupling ratios are kept constant. Vertical scaling, which further reduces the cell size due to less short channel effects, requires the improvement in the tunnel oxide quality. For this purpose, an improved process also was studied in terms of process temperature and phosphorus concentration in polysilicon gate. [ABSTRACT FROM AUTHOR]
Copyright of Electronics & Communications in Japan, Part 2: Electronics is the property of Wiley-Blackwell and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
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DbLabel: Engineering Source
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  Data: Downscaling of Floating-Gate EEPROM Modules for ASIC Applications.
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  Data: <searchLink fieldCode="AR" term="%22Shiba%2C+Kazuyoshi%22">Shiba, Kazuyoshi</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Kubota%2C+Katsuhiko%22">Kubota, Katsuhiko</searchLink><relatesTo>1</relatesTo>
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  Data: <searchLink fieldCode="JN" term="%22Electronics+%26+Communications+in+Japan%2C+Part+2%3A+Electronics%22">Electronics & Communications in Japan, Part 2: Electronics</searchLink>. Dec92, Vol. 75 Issue 12, p67-76. 10p.
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  Data: <searchLink fieldCode="DE" term="%22Integrated+circuits%22">Integrated circuits</searchLink><br /><searchLink fieldCode="DE" term="%22Read-only+memory%22">Read-only memory</searchLink><br /><searchLink fieldCode="DE" term="%22Electronic+circuits%22">Electronic circuits</searchLink><br /><searchLink fieldCode="DE" term="%22Scaling+laws+%28Statistical+physics%29%22">Scaling laws (Statistical physics)</searchLink><br /><searchLink fieldCode="DE" term="%22Logic+circuits%22">Logic circuits</searchLink><br /><searchLink fieldCode="DE" term="%22Computer+circuits%22">Computer circuits</searchLink>
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  Data: Downscaling methods of electrically erasable pros grammable ROM (EEPROM) for application-specific integrated circuit (ASIC) applications based on the double-poly floating-gate process were studied. Simple sealing of ASIC and EEPROM modules with the same scaling factor can significantly reduce the time for design and development. Horizontal scaling of the memory cell with unchanged vertical dimensions does not alter the cell performance because the capacitance coupling ratios are kept constant. Vertical scaling, which further reduces the cell size due to less short channel effects, requires the improvement in the tunnel oxide quality. For this purpose, an improved process also was studied in terms of process temperature and phosphorus concentration in polysilicon gate. [ABSTRACT FROM AUTHOR]
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  Data: <i>Copyright of Electronics & Communications in Japan, Part 2: Electronics is the property of Wiley-Blackwell and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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        Value: 10.1002/ecjb.4420751208
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      – Code: eng
        Text: English
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        PageCount: 10
        StartPage: 67
    Subjects:
      – SubjectFull: Integrated circuits
        Type: general
      – SubjectFull: Read-only memory
        Type: general
      – SubjectFull: Electronic circuits
        Type: general
      – SubjectFull: Scaling laws (Statistical physics)
        Type: general
      – SubjectFull: Logic circuits
        Type: general
      – SubjectFull: Computer circuits
        Type: general
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      – TitleFull: Downscaling of Floating-Gate EEPROM Modules for ASIC Applications.
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            NameFull: Shiba, Kazuyoshi
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            NameFull: Kubota, Katsuhiko
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            – D: 01
              M: 12
              Text: Dec92
              Type: published
              Y: 1992
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            – TitleFull: Electronics & Communications in Japan, Part 2: Electronics
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