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Micromachined CMOS thermoelectric generators as on-chip power supply

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Title: Micromachined CMOS thermoelectric generators as on-chip power supply
Authors: Strasser, M.1 marc.strasser@infineon.com, Aigner, R.2, Lauterbach, C.3, Sturm, T.F.3, Franosch, M.2, Wachutka, G.4
Source: Sensors & Actuators A: Physical. Sep2004, Vol. 114 Issue 2/3, p362-370. 9p.
Subjects: Electric power consumption, Electric utilities, Microelectronics, Semiconductors
Abstract: As the power consumption of a large number of microelectronic devices has been continuously reduced in recent years, power supply units of a few microwatts have become sufficient for their operation. Our improved micro-scale thermoelectric generator (μ-TEG) is based on polysilicon surface micromachining and is designed to convert waste heat into electrical power. Since this device is compatible with standard CMOS fabrication processes, it can be easily integrated on chip level and matches the needs for low-cost and small-size systems. As thermoelectric materials, both, pure poly-Si and poly-Si70%Ge30% have been investigated. Emphasis was placed on a thermally optimized design and the reduction of the total electrical resistance of the generator. As a result of these improvements, a voltage of 5 V and an electrical power output of 1 μW for a matched consumer is achieved with generators of 1 cm2 in size at a temperature drop of about 5 K. [Copyright &y& Elsevier]
Copyright of Sensors & Actuators A: Physical is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
FullText Text:
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Header DbId: egs
DbLabel: Engineering Source
An: 14187660
AccessLevel: 6
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Micromachined CMOS thermoelectric generators as on-chip power supply
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  Data: <searchLink fieldCode="AR" term="%22Strasser%2C+M%2E%22">Strasser, M.</searchLink><relatesTo>1</relatesTo><i> marc.strasser@infineon.com</i><br /><searchLink fieldCode="AR" term="%22Aigner%2C+R%2E%22">Aigner, R.</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AR" term="%22Lauterbach%2C+C%2E%22">Lauterbach, C.</searchLink><relatesTo>3</relatesTo><br /><searchLink fieldCode="AR" term="%22Sturm%2C+T%2EF%2E%22">Sturm, T.F.</searchLink><relatesTo>3</relatesTo><br /><searchLink fieldCode="AR" term="%22Franosch%2C+M%2E%22">Franosch, M.</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AR" term="%22Wachutka%2C+G%2E%22">Wachutka, G.</searchLink><relatesTo>4</relatesTo>
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  Data: <searchLink fieldCode="JN" term="%22Sensors+%26+Actuators+A%3A+Physical%22">Sensors & Actuators A: Physical</searchLink>. Sep2004, Vol. 114 Issue 2/3, p362-370. 9p.
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  Data: <searchLink fieldCode="DE" term="%22Electric+power+consumption%22">Electric power consumption</searchLink><br /><searchLink fieldCode="DE" term="%22Electric+utilities%22">Electric utilities</searchLink><br /><searchLink fieldCode="DE" term="%22Microelectronics%22">Microelectronics</searchLink><br /><searchLink fieldCode="DE" term="%22Semiconductors%22">Semiconductors</searchLink>
– Name: Abstract
  Label: Abstract
  Group: Ab
  Data: As the power consumption of a large number of microelectronic devices has been continuously reduced in recent years, power supply units of a few microwatts have become sufficient for their operation. Our improved micro-scale thermoelectric generator (μ-TEG) is based on polysilicon surface micromachining and is designed to convert waste heat into electrical power. Since this device is compatible with standard CMOS fabrication processes, it can be easily integrated on chip level and matches the needs for low-cost and small-size systems. As thermoelectric materials, both, pure poly-Si and poly-Si70%Ge30% have been investigated. Emphasis was placed on a thermally optimized design and the reduction of the total electrical resistance of the generator. As a result of these improvements, a voltage of 5 V and an electrical power output of 1 μW for a matched consumer is achieved with generators of 1 cm2 in size at a temperature drop of about 5 K. [Copyright &y& Elsevier]
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  Data: <i>Copyright of Sensors & Actuators A: Physical is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=egs&AN=14187660
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        Value: 10.1016/j.sna.2003.11.039
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        Text: English
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