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Effect of Annealing Temperature on Spatial Atomic Layer Deposited Titanium Oxide and Its Application in Perovskite Solar Cells.

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Title: Effect of Annealing Temperature on Spatial Atomic Layer Deposited Titanium Oxide and Its Application in Perovskite Solar Cells.
Authors: Hsu, Chia-Hsun1 (AUTHOR) chhsu@xmut.edu.cn, Chen, Ka-Te1 (AUTHOR) kachen-123@163.com, Huang, Pao-Hsun2 (AUTHOR) ph.huang@jmu.edu.cn, Wu, Wan-Yu3 (AUTHOR) wywu@mail.dyu.edu.tw, Zhang, Xiao-Ying1 (AUTHOR) xyzhang@xmut.edu.cn, Wang, Chen1 (AUTHOR) chenwang@xmut.edu.cn, Liang, Lu-Sheng4 (AUTHOR) lushengliang@fjirsm.ac.cn, Gao, Peng4 (AUTHOR) peng.gao@fjirsm.ac.cn, Qiu, Yu5 (AUTHOR) yuqiu@fjjxu.edu.cn, Lien, Shui-Yang1,3,6 (AUTHOR) asd2324884146@163.com, Su, Zhan-Bo1 (AUTHOR) s773951741@163.com, Chen, Zi-Rong1 (AUTHOR) wzzhu@xmut.edu.cn, Zhu, Wen-Zhang1,6 (AUTHOR)
Source: Nanomaterials (2079-4991). Jul2020, Vol. 10 Issue 7, p1322. 1p.
Subjects: Titanium oxides, Solar cells, Atomic layer deposition, Perovskite, Temperature effect, Electron transport
Abstract: In this study, spatial atomic layer deposition (sALD) is employed to prepare titanium dioxide (TiO2) thin films by using titanium tetraisopropoxide and water as metal and water precursors, respectively. The post-annealing temperature is varied to investigate its effect on the properties of the TiO2 films. The experimental results show that the sALD TiO2 has a similar deposition rate per cycle to other ALD processes using oxygen plasma or ozone oxidant, implying that the growth is limited by titanium tetraisopropoxide steric hindrance. The structure of the as-deposited sALD TiO2 films is amorphous and changes to polycrystalline anatase at the annealing temperature of 450 °C. All the sALD TiO2 films have a low absorption coefficient at the level of 10−3 cm−1 at wavelengths greater than 500 nm. The annealing temperatures of 550 °C are expected to have a high compactness, evaluated by the refractive index and x-ray photoelectron spectrometer measurements. Finally, the 550 °C-annealed sALD TiO2 film with a thickness of ~8 nm is applied to perovskite solar cells as a compact electron transport layer. The significantly enhanced open-circuit voltage and conversion efficiency demonstrate the great potential of the sALD TiO2 compact layer in perovskite solar cell applications. [ABSTRACT FROM AUTHOR]
Copyright of Nanomaterials (2079-4991) is the property of MDPI and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Effect of Annealing Temperature on Spatial Atomic Layer Deposited Titanium Oxide and Its Application in Perovskite Solar Cells.
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  Label: Authors
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  Data: <searchLink fieldCode="AR" term="%22Hsu%2C+Chia-Hsun%22">Hsu, Chia-Hsun</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> chhsu@xmut.edu.cn</i><br /><searchLink fieldCode="AR" term="%22Chen%2C+Ka-Te%22">Chen, Ka-Te</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> kachen-123@163.com</i><br /><searchLink fieldCode="AR" term="%22Huang%2C+Pao-Hsun%22">Huang, Pao-Hsun</searchLink><relatesTo>2</relatesTo> (AUTHOR)<i> ph.huang@jmu.edu.cn</i><br /><searchLink fieldCode="AR" term="%22Wu%2C+Wan-Yu%22">Wu, Wan-Yu</searchLink><relatesTo>3</relatesTo> (AUTHOR)<i> wywu@mail.dyu.edu.tw</i><br /><searchLink fieldCode="AR" term="%22Zhang%2C+Xiao-Ying%22">Zhang, Xiao-Ying</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> xyzhang@xmut.edu.cn</i><br /><searchLink fieldCode="AR" term="%22Wang%2C+Chen%22">Wang, Chen</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> chenwang@xmut.edu.cn</i><br /><searchLink fieldCode="AR" term="%22Liang%2C+Lu-Sheng%22">Liang, Lu-Sheng</searchLink><relatesTo>4</relatesTo> (AUTHOR)<i> lushengliang@fjirsm.ac.cn</i><br /><searchLink fieldCode="AR" term="%22Gao%2C+Peng%22">Gao, Peng</searchLink><relatesTo>4</relatesTo> (AUTHOR)<i> peng.gao@fjirsm.ac.cn</i><br /><searchLink fieldCode="AR" term="%22Qiu%2C+Yu%22">Qiu, Yu</searchLink><relatesTo>5</relatesTo> (AUTHOR)<i> yuqiu@fjjxu.edu.cn</i><br /><searchLink fieldCode="AR" term="%22Lien%2C+Shui-Yang%22">Lien, Shui-Yang</searchLink><relatesTo>1,3,6</relatesTo> (AUTHOR)<i> asd2324884146@163.com</i><br /><searchLink fieldCode="AR" term="%22Su%2C+Zhan-Bo%22">Su, Zhan-Bo</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> s773951741@163.com</i><br /><searchLink fieldCode="AR" term="%22Chen%2C+Zi-Rong%22">Chen, Zi-Rong</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> wzzhu@xmut.edu.cn</i><br /><searchLink fieldCode="AR" term="%22Zhu%2C+Wen-Zhang%22">Zhu, Wen-Zhang</searchLink><relatesTo>1,6</relatesTo> (AUTHOR)
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  Data: <searchLink fieldCode="JN" term="%22Nanomaterials+%282079-4991%29%22">Nanomaterials (2079-4991)</searchLink>. Jul2020, Vol. 10 Issue 7, p1322. 1p.
– Name: Subject
  Label: Subjects
  Group: Su
  Data: <searchLink fieldCode="DE" term="%22Titanium+oxides%22">Titanium oxides</searchLink><br /><searchLink fieldCode="DE" term="%22Solar+cells%22">Solar cells</searchLink><br /><searchLink fieldCode="DE" term="%22Atomic+layer+deposition%22">Atomic layer deposition</searchLink><br /><searchLink fieldCode="DE" term="%22Perovskite%22">Perovskite</searchLink><br /><searchLink fieldCode="DE" term="%22Temperature+effect%22">Temperature effect</searchLink><br /><searchLink fieldCode="DE" term="%22Electron+transport%22">Electron transport</searchLink>
– Name: Abstract
  Label: Abstract
  Group: Ab
  Data: In this study, spatial atomic layer deposition (sALD) is employed to prepare titanium dioxide (TiO2) thin films by using titanium tetraisopropoxide and water as metal and water precursors, respectively. The post-annealing temperature is varied to investigate its effect on the properties of the TiO2 films. The experimental results show that the sALD TiO2 has a similar deposition rate per cycle to other ALD processes using oxygen plasma or ozone oxidant, implying that the growth is limited by titanium tetraisopropoxide steric hindrance. The structure of the as-deposited sALD TiO2 films is amorphous and changes to polycrystalline anatase at the annealing temperature of 450 °C. All the sALD TiO2 films have a low absorption coefficient at the level of 10−3 cm−1 at wavelengths greater than 500 nm. The annealing temperatures of 550 °C are expected to have a high compactness, evaluated by the refractive index and x-ray photoelectron spectrometer measurements. Finally, the 550 °C-annealed sALD TiO2 film with a thickness of ~8 nm is applied to perovskite solar cells as a compact electron transport layer. The significantly enhanced open-circuit voltage and conversion efficiency demonstrate the great potential of the sALD TiO2 compact layer in perovskite solar cell applications. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Nanomaterials (2079-4991) is the property of MDPI and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.3390/nano10071322
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 1
        StartPage: 1322
    Subjects:
      – SubjectFull: Titanium oxides
        Type: general
      – SubjectFull: Solar cells
        Type: general
      – SubjectFull: Atomic layer deposition
        Type: general
      – SubjectFull: Perovskite
        Type: general
      – SubjectFull: Temperature effect
        Type: general
      – SubjectFull: Electron transport
        Type: general
    Titles:
      – TitleFull: Effect of Annealing Temperature on Spatial Atomic Layer Deposited Titanium Oxide and Its Application in Perovskite Solar Cells.
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              M: 07
              Text: Jul2020
              Type: published
              Y: 2020
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