APA (7th ed.) Citation

Butler, S. W. (1999). Process control through integrated metrology. Solid State Technology, 42(1), 33.

Chicago Style (17th ed.) Citation

Butler, Stephanie Watts. "Process Control Through Integrated Metrology." Solid State Technology 42, no. 1 (1999): 33.

MLA (9th ed.) Citation

Butler, Stephanie Watts. "Process Control Through Integrated Metrology." Solid State Technology, vol. 42, no. 1, 1999, p. 33.