Process control through integrated metrology.
Saved in:
| Title: | Process control through integrated metrology. |
|---|---|
| Authors: | Butler, Stephanie Watts |
| Source: | Solid State Technology. Jan99, Vol. 42 Issue 1, p33. 3p. 1 Diagram. |
| Subjects: | Semiconductor industrial equipment industry, Semiconductor industry, Electronic industries |
| Abstract: | Discusses the elements required for the development of a sensor-based controller. Meeting of required business factors; Development of all needed components; Integration of components; Measurement tool classification; Use of in situ sensors to improve productivity and control. |
| Database: | Engineering Source |
|
Full text is not displayed to guests.
Login for full access.
|
|
| Abstract: | Discusses the elements required for the development of a sensor-based controller. Meeting of required business factors; Development of all needed components; Integration of components; Measurement tool classification; Use of in situ sensors to improve productivity and control. |
|---|---|
| ISSN: | 0038111X |
