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Process control through integrated metrology.

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Title: Process control through integrated metrology.
Authors: Butler, Stephanie Watts
Source: Solid State Technology. Jan99, Vol. 42 Issue 1, p33. 3p. 1 Diagram.
Subjects: Semiconductor industrial equipment industry, Semiconductor industry, Electronic industries
Abstract: Discusses the elements required for the development of a sensor-based controller. Meeting of required business factors; Development of all needed components; Integration of components; Measurement tool classification; Use of in situ sensors to improve productivity and control.
Database: Engineering Source
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  Availability: 1
Header DbId: egs
DbLabel: Engineering Source
An: 1470427
AccessLevel: 6
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Discusses the elements required for the development of a sensor-based controller. Meeting of required business factors; Development of all needed components; Integration of components; Measurement tool classification; Use of in situ sensors to improve productivity and control.
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      – Code: eng
        Text: English
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        PageCount: 3
        StartPage: 33
    Subjects:
      – SubjectFull: Semiconductor industrial equipment industry
        Type: general
      – SubjectFull: Semiconductor industry
        Type: general
      – SubjectFull: Electronic industries
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              Text: Jan99
              Type: published
              Y: 1999
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