Sensitive RHEED signature of Ti-excess enabling enhanced cationic composition control during the molecular beam epitaxy of SrTiO3 based solid solutions.

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Title: Sensitive RHEED signature of Ti-excess enabling enhanced cationic composition control during the molecular beam epitaxy of SrTiO3 based solid solutions.
Authors: Razaghi Pey Ghaleh, Masoumeh1 (AUTHOR), d'Esperonnat, Marc1 (AUTHOR), Botella, Claude1 (AUTHOR), Cueff, Sébastien1 (AUTHOR), Bachelet, Romain1 (AUTHOR), Saint-Girons, Guillaume1 (AUTHOR) guillaume.saint-girons@ec-lyon.fr
Source: CrystEngComm. 3/21/2021, Vol. 23 Issue 11, p2269-2275. 7p.
Subjects: Reflection high energy electron diffraction, Molecular beam epitaxy, Solid solutions, Surface reconstruction
Abstract: Molecular beam epitaxy (MBE) is the best suited technique to engineer perovskite oxide properties, thanks to individual atom evaporation from elemental sources. Unfortunately, significant source drift often prevents exploiting this advantage, and improving the control of the composition of MBE grown oxide thin layers remains a challenge. In this context, in situ reflection high energy electron diffraction (RHEED) has long been identified as a useful tool, as surface reconstructions and RHEED oscillations depend on oxide cationic composition. We show here that monitoring the appearance of half-order streaks along the [210] RHEED azimuths of Ti-rich surfaces provides enhanced control of the cationic composition of SrTiO3 thin layers as compared to the more common strategy relying on [100] azimuths monitoring. We also provide quantitative evaluation of the uncertainty on composition control enabled by this method, namely ±6.7%. In the end, we describe an original procedure to control the composition of perovskite oxide quaternary solid solutions. [ABSTRACT FROM AUTHOR]
Copyright of CrystEngComm is the property of Royal Society of Chemistry and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
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  Group: Ti
  Data: Sensitive RHEED signature of Ti-excess enabling enhanced cationic composition control during the molecular beam epitaxy of SrTiO<subscript>3</subscript> based solid solutions.
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  Data: <searchLink fieldCode="JN" term="%22CrystEngComm%22">CrystEngComm</searchLink>. 3/21/2021, Vol. 23 Issue 11, p2269-2275. 7p.
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  Data: <searchLink fieldCode="DE" term="%22Reflection+high+energy+electron+diffraction%22">Reflection high energy electron diffraction</searchLink><br /><searchLink fieldCode="DE" term="%22Molecular+beam+epitaxy%22">Molecular beam epitaxy</searchLink><br /><searchLink fieldCode="DE" term="%22Solid+solutions%22">Solid solutions</searchLink><br /><searchLink fieldCode="DE" term="%22Surface+reconstruction%22">Surface reconstruction</searchLink>
– Name: Abstract
  Label: Abstract
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  Data: Molecular beam epitaxy (MBE) is the best suited technique to engineer perovskite oxide properties, thanks to individual atom evaporation from elemental sources. Unfortunately, significant source drift often prevents exploiting this advantage, and improving the control of the composition of MBE grown oxide thin layers remains a challenge. In this context, in situ reflection high energy electron diffraction (RHEED) has long been identified as a useful tool, as surface reconstructions and RHEED oscillations depend on oxide cationic composition. We show here that monitoring the appearance of half-order streaks along the [210] RHEED azimuths of Ti-rich surfaces provides enhanced control of the cationic composition of SrTiO3 thin layers as compared to the more common strategy relying on [100] azimuths monitoring. We also provide quantitative evaluation of the uncertainty on composition control enabled by this method, namely ±6.7%. In the end, we describe an original procedure to control the composition of perovskite oxide quaternary solid solutions. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of CrystEngComm is the property of Royal Society of Chemistry and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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        Value: 10.1039/d1ce00013f
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        Text: English
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              Text: 3/21/2021
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              Y: 2021
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