Deposition and Characterization of RP-ALD SiO 2 Thin Films with Different Oxygen Plasma Powers. - Zhang, Xiao-Ying; Yang, Yue; Zhang, Zhi-Xuan; Geng, Xin-Peng; Hsu, Chia-Hsun; Wu, Wan-Yu; Lien, Shui-Yang; Zhu, Wen-Zhang; Pohl, Pawel (Nanomaterials (2079-4991), 2021)