Unexpected and enhanced electrostatic adsorption capacity of oxygen vacancy-rich cobalt-doped In2O3 for high-sensitive MEMS toluene sensor.

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Title: Unexpected and enhanced electrostatic adsorption capacity of oxygen vacancy-rich cobalt-doped In2O3 for high-sensitive MEMS toluene sensor.
Authors: Wang, Tianshuang1 (AUTHOR), Liu, Siyu2 (AUTHOR), Sun, Peng1,3 (AUTHOR) pengsun@jlu.edu.cn, Wang, Yanchao1,2 (AUTHOR) wyc@calypso.cn, Shimanoe, Kengo4 (AUTHOR), Lu, Geyu1,3 (AUTHOR) lugy@jlu.edu.cn
Source: Sensors & Actuators B: Chemical. Sep2021, Vol. 342, pN.PAG-N.PAG. 1p.
Subjects: Toluene, Adsorption capacity, Gas detectors, Metal oxide semiconductors, Cobalt, Olfactory receptors, Detection limit, Density functional theory
Abstract: Benefiting from the enhanced electrostatic adsorption derived from surface oxygen vacancy, the reported MEMS based hollow-porous Co-In 2 O 3 gas sensor exhibits excellent selectivity and response, and toluene detection limits as low as 100 ppb at the lowest temperature so far. [Display omitted] • The hollow-porous Co-doped In 2 O 3 microspheres with abundant electrostatic adsorption sites were synthesized by ultrasonic spray pyrolysis. • The MEMS toluene sensor reported in this work with the characteristic of low power consumption. • The Co-In 2 O 3 gas sensor exhibits high sensitivity and superior selectivity to ppb level of toluene at relatively lower temperature. • Demonstrating the impact of electrostatic adsorption on charge carrier transport and toluene sensing performance by DFT calculation. Semiconductor metal oxide (SMO) gas sensor has been widely researched in artificial olfactory for monitoring gases and odor. However, realizing the characteristics of low detection limit, immunity from interference capacity and low operating temperature still remains challenge. Herein, the synthesis of hollow-porous cobalt-doped In 2 O 3 sensing material with abundant surface oxygen vacancy (SOV) via one-pot and in-situ doping approach is reported. With their rich active sites, the Co-In 2 O 3 exhibits unexpected and high electrostatic adsorption of toluene at 175 °C, which obviously inducing the charge carrier transport. Accordingly, the final Microelectro Mechanical Systems (MEMS) based Co-In 2 O 3 gas sensor exhibits excellent selectivity and response, and toluene detection limits as low as 100 ppb at the lowest temperature so far. Density functional theory (DFT) calculations elucidated that the enhanced electrostatic adsorption is ascribed to the toluene preferentially bound to O 3c atom site (bridging oxygen atom near SOV) on Co-In_b-D 4 (110) surface, which will induce charge carrier accumulation layer and cause temperature-dependent abnormal pseudo p-type response. This work points out that the electrostatic adsorption derived from SOV could obviously modulate SMO sensing properties, and further supplements the defect engineering. [ABSTRACT FROM AUTHOR]
Copyright of Sensors & Actuators B: Chemical is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Unexpected and enhanced electrostatic adsorption capacity of oxygen vacancy-rich cobalt-doped In2O3 for high-sensitive MEMS toluene sensor.
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  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AR" term="%22Wang%2C+Tianshuang%22">Wang, Tianshuang</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Liu%2C+Siyu%22">Liu, Siyu</searchLink><relatesTo>2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Sun%2C+Peng%22">Sun, Peng</searchLink><relatesTo>1,3</relatesTo> (AUTHOR)<i> pengsun@jlu.edu.cn</i><br /><searchLink fieldCode="AR" term="%22Wang%2C+Yanchao%22">Wang, Yanchao</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<i> wyc@calypso.cn</i><br /><searchLink fieldCode="AR" term="%22Shimanoe%2C+Kengo%22">Shimanoe, Kengo</searchLink><relatesTo>4</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Lu%2C+Geyu%22">Lu, Geyu</searchLink><relatesTo>1,3</relatesTo> (AUTHOR)<i> lugy@jlu.edu.cn</i>
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  Data: <searchLink fieldCode="JN" term="%22Sensors+%26+Actuators+B%3A+Chemical%22">Sensors & Actuators B: Chemical</searchLink>. Sep2021, Vol. 342, pN.PAG-N.PAG. 1p.
– Name: Subject
  Label: Subjects
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  Data: <searchLink fieldCode="DE" term="%22Toluene%22">Toluene</searchLink><br /><searchLink fieldCode="DE" term="%22Adsorption+capacity%22">Adsorption capacity</searchLink><br /><searchLink fieldCode="DE" term="%22Gas+detectors%22">Gas detectors</searchLink><br /><searchLink fieldCode="DE" term="%22Metal+oxide+semiconductors%22">Metal oxide semiconductors</searchLink><br /><searchLink fieldCode="DE" term="%22Cobalt%22">Cobalt</searchLink><br /><searchLink fieldCode="DE" term="%22Olfactory+receptors%22">Olfactory receptors</searchLink><br /><searchLink fieldCode="DE" term="%22Detection+limit%22">Detection limit</searchLink><br /><searchLink fieldCode="DE" term="%22Density+functional+theory%22">Density functional theory</searchLink>
– Name: Abstract
  Label: Abstract
  Group: Ab
  Data: Benefiting from the enhanced electrostatic adsorption derived from surface oxygen vacancy, the reported MEMS based hollow-porous Co-In 2 O 3 gas sensor exhibits excellent selectivity and response, and toluene detection limits as low as 100 ppb at the lowest temperature so far. [Display omitted] • The hollow-porous Co-doped In 2 O 3 microspheres with abundant electrostatic adsorption sites were synthesized by ultrasonic spray pyrolysis. • The MEMS toluene sensor reported in this work with the characteristic of low power consumption. • The Co-In 2 O 3 gas sensor exhibits high sensitivity and superior selectivity to ppb level of toluene at relatively lower temperature. • Demonstrating the impact of electrostatic adsorption on charge carrier transport and toluene sensing performance by DFT calculation. Semiconductor metal oxide (SMO) gas sensor has been widely researched in artificial olfactory for monitoring gases and odor. However, realizing the characteristics of low detection limit, immunity from interference capacity and low operating temperature still remains challenge. Herein, the synthesis of hollow-porous cobalt-doped In 2 O 3 sensing material with abundant surface oxygen vacancy (SOV) via one-pot and in-situ doping approach is reported. With their rich active sites, the Co-In 2 O 3 exhibits unexpected and high electrostatic adsorption of toluene at 175 °C, which obviously inducing the charge carrier transport. Accordingly, the final Microelectro Mechanical Systems (MEMS) based Co-In 2 O 3 gas sensor exhibits excellent selectivity and response, and toluene detection limits as low as 100 ppb at the lowest temperature so far. Density functional theory (DFT) calculations elucidated that the enhanced electrostatic adsorption is ascribed to the toluene preferentially bound to O 3c atom site (bridging oxygen atom near SOV) on Co-In_b-D 4 (110) surface, which will induce charge carrier accumulation layer and cause temperature-dependent abnormal pseudo p-type response. This work points out that the electrostatic adsorption derived from SOV could obviously modulate SMO sensing properties, and further supplements the defect engineering. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Sensors & Actuators B: Chemical is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1016/j.snb.2021.129949
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 1
        StartPage: N.PAG
    Subjects:
      – SubjectFull: Toluene
        Type: general
      – SubjectFull: Adsorption capacity
        Type: general
      – SubjectFull: Gas detectors
        Type: general
      – SubjectFull: Metal oxide semiconductors
        Type: general
      – SubjectFull: Cobalt
        Type: general
      – SubjectFull: Olfactory receptors
        Type: general
      – SubjectFull: Detection limit
        Type: general
      – SubjectFull: Density functional theory
        Type: general
    Titles:
      – TitleFull: Unexpected and enhanced electrostatic adsorption capacity of oxygen vacancy-rich cobalt-doped In2O3 for high-sensitive MEMS toluene sensor.
        Type: main
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            NameFull: Wang, Tianshuang
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            NameFull: Liu, Siyu
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            NameFull: Sun, Peng
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            NameFull: Wang, Yanchao
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            NameFull: Shimanoe, Kengo
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            NameFull: Lu, Geyu
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          Dates:
            – D: 01
              M: 09
              Text: Sep2021
              Type: published
              Y: 2021
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              Value: 09254005
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              Value: 342
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            – TitleFull: Sensors & Actuators B: Chemical
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