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Application of Molecular Vapour Deposited Al 2 O 3 for Graphene-Based Biosensor Passivation and Improvements in Graphene Device Homogeneity.

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Title: Application of Molecular Vapour Deposited Al 2 O 3 for Graphene-Based Biosensor Passivation and Improvements in Graphene Device Homogeneity.
Authors: Ali, Muhammad Munem1 (AUTHOR) j.j.mitchell@swansea.ac.uk, Mitchell, Jacob John1 (AUTHOR) e.daghighahmadi@swansea.ac.uk, Burwell, Gregory2 (AUTHOR) g.burwell@swansea.ac.uk, Rejnhard, Klaudia2 (AUTHOR) 988211@swansea.ac.uk, Jenkins, Cerys Anne3 (AUTHOR) cerys.jenkins@swansea.ac.uk, Daghigh Ahmadi, Ehsaneh1 (AUTHOR), Sharma, Sanjiv4 (AUTHOR) sanjiv.sharma@swansea.ac.uk, Guy, Owen James1,5 (AUTHOR) m.m.ali@swansea.ac.uk
Source: Nanomaterials (2079-4991). Aug2021, Vol. 11 Issue 8, p2121. 1p.
Subjects: Passivation, Chemical detectors, Homogeneity, Dielectric films, Vapors, Oxygen
Abstract: Graphene-based point-of-care (PoC) and chemical sensors can be fabricated using photolithographic processes at wafer-scale. However, these approaches are known to leave polymer residues on the graphene surface, which are difficult to remove completely. In addition, graphene growth and transfer processes can introduce defects into the graphene layer. Both defects and resist contamination can affect the homogeneity of graphene-based PoC sensors, leading to inconsistent device performance and unreliable sensing. Sensor reliability is also affected by the harsh chemical environments used for chemical functionalisation of graphene PoC sensors, which can degrade parts of the sensor device. Therefore, a reliable, wafer-scale method of passivation, which isolates the graphene from the rest of the device, protecting the less robust device features from any aggressive chemicals, must be devised. This work covers the application of molecular vapour deposition technology to create a dielectric passivation film that protects graphene-based biosensing devices from harsh chemicals. We utilise a previously reported "healing effect" of Al2O3 on graphene to reduce photoresist residue from the graphene surface and reduce the prevalence of graphene defects to improve graphene device homogeneity. The improvement in device consistency allows for more reliable, homogeneous graphene devices, that can be fabricated at wafer-scale for sensing and biosensing applications. [ABSTRACT FROM AUTHOR]
Copyright of Nanomaterials (2079-4991) is the property of MDPI and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
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  Data: Application of Molecular Vapour Deposited Al 2 O 3 for Graphene-Based Biosensor Passivation and Improvements in Graphene Device Homogeneity.
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  Data: <searchLink fieldCode="AR" term="%22Ali%2C+Muhammad+Munem%22">Ali, Muhammad Munem</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> j.j.mitchell@swansea.ac.uk</i><br /><searchLink fieldCode="AR" term="%22Mitchell%2C+Jacob+John%22">Mitchell, Jacob John</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> e.daghighahmadi@swansea.ac.uk</i><br /><searchLink fieldCode="AR" term="%22Burwell%2C+Gregory%22">Burwell, Gregory</searchLink><relatesTo>2</relatesTo> (AUTHOR)<i> g.burwell@swansea.ac.uk</i><br /><searchLink fieldCode="AR" term="%22Rejnhard%2C+Klaudia%22">Rejnhard, Klaudia</searchLink><relatesTo>2</relatesTo> (AUTHOR)<i> 988211@swansea.ac.uk</i><br /><searchLink fieldCode="AR" term="%22Jenkins%2C+Cerys+Anne%22">Jenkins, Cerys Anne</searchLink><relatesTo>3</relatesTo> (AUTHOR)<i> cerys.jenkins@swansea.ac.uk</i><br /><searchLink fieldCode="AR" term="%22Daghigh+Ahmadi%2C+Ehsaneh%22">Daghigh Ahmadi, Ehsaneh</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Sharma%2C+Sanjiv%22">Sharma, Sanjiv</searchLink><relatesTo>4</relatesTo> (AUTHOR)<i> sanjiv.sharma@swansea.ac.uk</i><br /><searchLink fieldCode="AR" term="%22Guy%2C+Owen+James%22">Guy, Owen James</searchLink><relatesTo>1,5</relatesTo> (AUTHOR)<i> m.m.ali@swansea.ac.uk</i>
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  Data: <searchLink fieldCode="JN" term="%22Nanomaterials+%282079-4991%29%22">Nanomaterials (2079-4991)</searchLink>. Aug2021, Vol. 11 Issue 8, p2121. 1p.
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  Data: <searchLink fieldCode="DE" term="%22Passivation%22">Passivation</searchLink><br /><searchLink fieldCode="DE" term="%22Chemical+detectors%22">Chemical detectors</searchLink><br /><searchLink fieldCode="DE" term="%22Homogeneity%22">Homogeneity</searchLink><br /><searchLink fieldCode="DE" term="%22Dielectric+films%22">Dielectric films</searchLink><br /><searchLink fieldCode="DE" term="%22Vapors%22">Vapors</searchLink><br /><searchLink fieldCode="DE" term="%22Oxygen%22">Oxygen</searchLink>
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  Data: Graphene-based point-of-care (PoC) and chemical sensors can be fabricated using photolithographic processes at wafer-scale. However, these approaches are known to leave polymer residues on the graphene surface, which are difficult to remove completely. In addition, graphene growth and transfer processes can introduce defects into the graphene layer. Both defects and resist contamination can affect the homogeneity of graphene-based PoC sensors, leading to inconsistent device performance and unreliable sensing. Sensor reliability is also affected by the harsh chemical environments used for chemical functionalisation of graphene PoC sensors, which can degrade parts of the sensor device. Therefore, a reliable, wafer-scale method of passivation, which isolates the graphene from the rest of the device, protecting the less robust device features from any aggressive chemicals, must be devised. This work covers the application of molecular vapour deposition technology to create a dielectric passivation film that protects graphene-based biosensing devices from harsh chemicals. We utilise a previously reported "healing effect" of Al2O3 on graphene to reduce photoresist residue from the graphene surface and reduce the prevalence of graphene defects to improve graphene device homogeneity. The improvement in device consistency allows for more reliable, homogeneous graphene devices, that can be fabricated at wafer-scale for sensing and biosensing applications. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Nanomaterials (2079-4991) is the property of MDPI and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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        Value: 10.3390/nano11082121
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        Text: English
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    Subjects:
      – SubjectFull: Passivation
        Type: general
      – SubjectFull: Chemical detectors
        Type: general
      – SubjectFull: Homogeneity
        Type: general
      – SubjectFull: Dielectric films
        Type: general
      – SubjectFull: Vapors
        Type: general
      – SubjectFull: Oxygen
        Type: general
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      – TitleFull: Application of Molecular Vapour Deposited Al 2 O 3 for Graphene-Based Biosensor Passivation and Improvements in Graphene Device Homogeneity.
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              M: 08
              Text: Aug2021
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              Y: 2021
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