Effect of nitrogen content on structural and mechanical properties of AlTiZrTaHf(-N) high entropy films deposited by reactive magnetron sputtering. - El Garah, Mohamed; Touaibia, Djallel Eddine; Achache, Sofiane; Michau, Alexandre; Sviridova, Elizaveta; Postnikov, Pavel S.; Chehimi, Mohamed M.; Schuster, Frederic; Sanchette, Frederic (Surface & Coatings Technology, 2022)