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H3PO4-based wet chemical etching for recovery of dry-etched GaN surfaces.

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Title: H3PO4-based wet chemical etching for recovery of dry-etched GaN surfaces.
Authors: Benrabah, Sabria1,2,3 (AUTHOR) sabria.benrabah@gmail.com, Legallais, Maxime2 (AUTHOR), Besson, Pascal4 (AUTHOR), Ruel, Simon1 (AUTHOR), Vauche, Laura1 (AUTHOR), Pelissier, Bernard2 (AUTHOR), Thieuleux, Chloé3 (AUTHOR), Salem, Bassem2 (AUTHOR), Charles, Matthew1 (AUTHOR) matthew.charles@cea.fr
Source: Applied Surface Science. Apr2022, Vol. 582, pN.PAG-N.PAG. 1p.
Subjects: Gallium nitride, Plasma etching, X-ray photoelectron spectroscopy, Atomic force microscopy, Etching
Abstract: [Display omitted] • Phosphoric acid induces significant changes on GaN surface chemistry and morphology. • Phosphoric acid can recover damaged dry-etched GaN surfaces. • Extension of etching duration leads to atomic step recovery on dry-etched surface. • Surface evolution with phosphoric acid is affected by prior surface treatments. The impact of several wet etchants commonly encountered in the microelectronic industry on the surface chemistry of GaN on silicon was explored. In order to get closer to fully recessed gate HEMT fabrication processes, we investigated different kinds of GaN surfaces. This study was conducted on as-grown GaN and dry etched GaN, with etching consisting of inductive coupled plasma reactive ion etching (ICP-RIE), followed by atomic layer etching (ALE) and O 2 plasma stripping. The impact of each wet treatment was evaluated by parallel Angle Resolved X-ray Photoelectron Spectroscopy (pAR-XPS). Treatment with phosphoric acid (H 3 PO 4) showed a significant modification of the surface and further studies were performed using this treatment. The impact of H 3 PO 4 on GaN surface chemistry and morphology was assessed by pAR-XPS and atomic force microscopy (AFM) respectively. A delayed effect was observed for dry etched samples compared to as-grown samples, with a successful recovery of the surface after 60 min of treatment. We also proposed a mechanism explaining the progressive formation on steps on the surface over time. Further research was performed on dry etched samples without ALE which also modified the delay time of the H 3 PO 4 treatment, but still enabled a recovery of the surface morphology. In contrast to other studies, we showed that, with the appropriate choice of parameters for the H 3 PO 4 treatment, it was possible to successfully recover the GaN surface after dry etching without significantly opening dislocation holes. This is therefore a promising treatment to be used during GaN HEMT processing to recover good quality surfaces after etching. [ABSTRACT FROM AUTHOR]
Copyright of Applied Surface Science is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
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  Data: H3PO4-based wet chemical etching for recovery of dry-etched GaN surfaces.
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  Data: <searchLink fieldCode="AR" term="%22Benrabah%2C+Sabria%22">Benrabah, Sabria</searchLink><relatesTo>1,2,3</relatesTo> (AUTHOR)<i> sabria.benrabah@gmail.com</i><br /><searchLink fieldCode="AR" term="%22Legallais%2C+Maxime%22">Legallais, Maxime</searchLink><relatesTo>2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Besson%2C+Pascal%22">Besson, Pascal</searchLink><relatesTo>4</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Ruel%2C+Simon%22">Ruel, Simon</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Vauche%2C+Laura%22">Vauche, Laura</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Pelissier%2C+Bernard%22">Pelissier, Bernard</searchLink><relatesTo>2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Thieuleux%2C+Chloé%22">Thieuleux, Chloé</searchLink><relatesTo>3</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Salem%2C+Bassem%22">Salem, Bassem</searchLink><relatesTo>2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Charles%2C+Matthew%22">Charles, Matthew</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> matthew.charles@cea.fr</i>
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  Data: <searchLink fieldCode="JN" term="%22Applied+Surface+Science%22">Applied Surface Science</searchLink>. Apr2022, Vol. 582, pN.PAG-N.PAG. 1p.
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  Data: <searchLink fieldCode="DE" term="%22Gallium+nitride%22">Gallium nitride</searchLink><br /><searchLink fieldCode="DE" term="%22Plasma+etching%22">Plasma etching</searchLink><br /><searchLink fieldCode="DE" term="%22X-ray+photoelectron+spectroscopy%22">X-ray photoelectron spectroscopy</searchLink><br /><searchLink fieldCode="DE" term="%22Atomic+force+microscopy%22">Atomic force microscopy</searchLink><br /><searchLink fieldCode="DE" term="%22Etching%22">Etching</searchLink>
– Name: Abstract
  Label: Abstract
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  Data: [Display omitted] • Phosphoric acid induces significant changes on GaN surface chemistry and morphology. • Phosphoric acid can recover damaged dry-etched GaN surfaces. • Extension of etching duration leads to atomic step recovery on dry-etched surface. • Surface evolution with phosphoric acid is affected by prior surface treatments. The impact of several wet etchants commonly encountered in the microelectronic industry on the surface chemistry of GaN on silicon was explored. In order to get closer to fully recessed gate HEMT fabrication processes, we investigated different kinds of GaN surfaces. This study was conducted on as-grown GaN and dry etched GaN, with etching consisting of inductive coupled plasma reactive ion etching (ICP-RIE), followed by atomic layer etching (ALE) and O 2 plasma stripping. The impact of each wet treatment was evaluated by parallel Angle Resolved X-ray Photoelectron Spectroscopy (pAR-XPS). Treatment with phosphoric acid (H 3 PO 4) showed a significant modification of the surface and further studies were performed using this treatment. The impact of H 3 PO 4 on GaN surface chemistry and morphology was assessed by pAR-XPS and atomic force microscopy (AFM) respectively. A delayed effect was observed for dry etched samples compared to as-grown samples, with a successful recovery of the surface after 60 min of treatment. We also proposed a mechanism explaining the progressive formation on steps on the surface over time. Further research was performed on dry etched samples without ALE which also modified the delay time of the H 3 PO 4 treatment, but still enabled a recovery of the surface morphology. In contrast to other studies, we showed that, with the appropriate choice of parameters for the H 3 PO 4 treatment, it was possible to successfully recover the GaN surface after dry etching without significantly opening dislocation holes. This is therefore a promising treatment to be used during GaN HEMT processing to recover good quality surfaces after etching. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Applied Surface Science is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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      – Type: doi
        Value: 10.1016/j.apsusc.2021.152309
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      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 1
        StartPage: N.PAG
    Subjects:
      – SubjectFull: Gallium nitride
        Type: general
      – SubjectFull: Plasma etching
        Type: general
      – SubjectFull: X-ray photoelectron spectroscopy
        Type: general
      – SubjectFull: Atomic force microscopy
        Type: general
      – SubjectFull: Etching
        Type: general
    Titles:
      – TitleFull: H3PO4-based wet chemical etching for recovery of dry-etched GaN surfaces.
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            – D: 30
              M: 04
              Text: Apr2022
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              Y: 2022
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