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Synthesis of ultrathin heteroepitaxial 3C-SiC films by pyrolysis of molecular layer deposition polyamide films on Si.

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Title: Synthesis of ultrathin heteroepitaxial 3C-SiC films by pyrolysis of molecular layer deposition polyamide films on Si.
Authors: Amashaev, Rustam R.1 (AUTHOR), Alikhanov, Nariman M.-R.1 (AUTHOR), Ismailov, Abubakar M.1 (AUTHOR), Abdulagatov, Ilmutdin M.1 (AUTHOR) ilmutdina@gmail.com
Source: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films. Sep2022, Vol. 40 Issue 5, p1-11. 11p.
Subjects: Robert Bosch GmbH, Monomolecular films, X-ray photoelectron spectroscopy, Transmission electron microscopes, Thin films, Polyamides
Abstract: Polyamide films were grown on Si(111) using a molecular layer deposition (MLD) process with 1,2-ethylenediamine and trimesoyl chloride precursors at 120 °C. Synthesized polyamide films on Si(111) were then pyrolyzed in vacuum (10−7 Torr) to yield crystalline SiC thin films. High-resolution transmission electron microscope images of heat-treated samples showed the heteroepitaxial nature of the synthesized 3C-SiC (β-SiC) with respect to the Si(111) substrate. Raman, x-ray photoelectron spectroscopy, and x-ray diffraction analysis confirmed the formation of single-crystal SiC films. Samples pyrolyzed at 1300 °C showed defects attributed to Si sublimation. Formation of highly conformal SiC film after pyrolysis was demonstrated using Bosch-processed Si trenches. The thicknesses of 3C-SiC films obtained after pyrolysis were linearly dependent on the number of MLD cycles used to deposit polyamide films. [ABSTRACT FROM AUTHOR]
Copyright of Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films is the property of American Institute of Physics and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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DbLabel: Engineering Source
An: 158883841
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PubTypeId: academicJournal
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  Label: Title
  Group: Ti
  Data: Synthesis of ultrathin heteroepitaxial 3C-SiC films by pyrolysis of molecular layer deposition polyamide films on Si.
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  Data: <searchLink fieldCode="AR" term="%22Amashaev%2C+Rustam+R%2E%22">Amashaev, Rustam R.</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Alikhanov%2C+Nariman+M%2E-R%2E%22">Alikhanov, Nariman M.-R.</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Ismailov%2C+Abubakar+M%2E%22">Ismailov, Abubakar M.</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Abdulagatov%2C+Ilmutdin+M%2E%22">Abdulagatov, Ilmutdin M.</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> ilmutdina@gmail.com</i>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Vacuum+Science+%26+Technology%3A+Part+A-Vacuums%2C+Surfaces+%26+Films%22">Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films</searchLink>. Sep2022, Vol. 40 Issue 5, p1-11. 11p.
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  Data: <searchLink fieldCode="DE" term="%22Robert+Bosch+GmbH%22">Robert Bosch GmbH</searchLink><br /><searchLink fieldCode="DE" term="%22Monomolecular+films%22">Monomolecular films</searchLink><br /><searchLink fieldCode="DE" term="%22X-ray+photoelectron+spectroscopy%22">X-ray photoelectron spectroscopy</searchLink><br /><searchLink fieldCode="DE" term="%22Transmission+electron+microscopes%22">Transmission electron microscopes</searchLink><br /><searchLink fieldCode="DE" term="%22Thin+films%22">Thin films</searchLink><br /><searchLink fieldCode="DE" term="%22Polyamides%22">Polyamides</searchLink>
– Name: Abstract
  Label: Abstract
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  Data: Polyamide films were grown on Si(111) using a molecular layer deposition (MLD) process with 1,2-ethylenediamine and trimesoyl chloride precursors at 120 °C. Synthesized polyamide films on Si(111) were then pyrolyzed in vacuum (10−7 Torr) to yield crystalline SiC thin films. High-resolution transmission electron microscope images of heat-treated samples showed the heteroepitaxial nature of the synthesized 3C-SiC (β-SiC) with respect to the Si(111) substrate. Raman, x-ray photoelectron spectroscopy, and x-ray diffraction analysis confirmed the formation of single-crystal SiC films. Samples pyrolyzed at 1300 °C showed defects attributed to Si sublimation. Formation of highly conformal SiC film after pyrolysis was demonstrated using Bosch-processed Si trenches. The thicknesses of 3C-SiC films obtained after pyrolysis were linearly dependent on the number of MLD cycles used to deposit polyamide films. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films is the property of American Institute of Physics and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.1116/6.0001889
    Languages:
      – Code: eng
        Text: English
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      Pagination:
        PageCount: 11
        StartPage: 1
    Subjects:
      – SubjectFull: Robert Bosch GmbH
        Type: general
      – SubjectFull: Monomolecular films
        Type: general
      – SubjectFull: X-ray photoelectron spectroscopy
        Type: general
      – SubjectFull: Transmission electron microscopes
        Type: general
      – SubjectFull: Thin films
        Type: general
      – SubjectFull: Polyamides
        Type: general
    Titles:
      – TitleFull: Synthesis of ultrathin heteroepitaxial 3C-SiC films by pyrolysis of molecular layer deposition polyamide films on Si.
        Type: main
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      – PersonEntity:
          Name:
            NameFull: Amashaev, Rustam R.
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            NameFull: Alikhanov, Nariman M.-R.
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          Name:
            NameFull: Ismailov, Abubakar M.
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            NameFull: Abdulagatov, Ilmutdin M.
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            – D: 01
              M: 09
              Text: Sep2022
              Type: published
              Y: 2022
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              Value: 40
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              Value: 5
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            – TitleFull: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films
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