Butler, S. W., York, R., Bennett, M. H., & Winter, T. (1999). SEMICONDUCTOR FACTORY CONTROL AND OPTIMIZATION. Encyclopedia of Electrical & Electronics Engineering, 19, 59.
Chicago Style (17th ed.) CitationButler, Stephanie Watts, Rudy York, Marylyn Hoy Bennett, and Tom Winter. "SEMICONDUCTOR FACTORY CONTROL AND OPTIMIZATION." Encyclopedia of Electrical & Electronics Engineering 19 (1999): 59.
MLA (9th ed.) CitationButler, Stephanie Watts, et al. "SEMICONDUCTOR FACTORY CONTROL AND OPTIMIZATION." Encyclopedia of Electrical & Electronics Engineering, vol. 19, 1999, p. 59.
Warning: These citations may not always be 100% accurate.