Dry oxidation of MBE-SiGe films: rate enhancement, Ge redistribution and defect injection - Spadafora, M.; Terrasi, A.; Mirabella, S.; Piro, A.; Grimaldi, M.G.; Scalese, S.; Napolitani, E.; Di Marino, M.; De Salvador, D.; Carnera, A. (Materials Science in Semiconductor Processing, 2005)