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Design of heterostructure one-port SAW resonator with improved bandwidth using Si and LiNbO3 layer.

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Title: Design of heterostructure one-port SAW resonator with improved bandwidth using Si and LiNbO3 layer.
Authors: Turuk, Baruna Kumar1 basudeb.ece@nitjsr.ac.in, Behera, Basudeba1
Source: Ferroelectrics. 2023, Vol. 615 Issue 1, p132-142. 11p.
Subjects: Acoustic surface waves, Resonators, Lithium niobate, Optical resonators, Bandwidths, Quality factor, MEMS resonators, Bandpass filters
Abstract: In this research work, we have designed a heterostructure one-port surface acoustic wave (SAW) resonator. The multi-layer one port SAW resonator is made of a silicon (Si) substrate as base material, 128 rotated Y-cut X-propagated lithium niobate (LiNbO3) as piezoelectric substrate, and Inter Digital Transducers (IDTs) made of aluminium. This model is designed to operate on a wide frequency of 4-5 GHz with a resonance frequency of 4.74GHz. Various parameters are taken into consideration during the study and analysis such as high-quality factor, wider bandwidth, better electromechanical coupling coefficient, and a true Figure of merit (FoM). The obtained Quality factor and the electromechanical coupling coefficient (k²) of the designed model are 2700 and 0.18. By using the wide range of frequencies, the bandwidth for the designed model is 1.74MHz. The obtained results show that the device's performance of the one port multilayer SAW resonator using the Al/128οYXLiNbO3/Si multi-layered substrate exhibits a commercial application in the 5G wireless communication system. [ABSTRACT FROM AUTHOR]
Copyright of Ferroelectrics is the property of Taylor & Francis Ltd and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
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  Data: Design of heterostructure one-port SAW resonator with improved bandwidth using Si and LiNbO<subscript>3</subscript> layer.
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  Data: <searchLink fieldCode="AR" term="%22Turuk%2C+Baruna+Kumar%22">Turuk, Baruna Kumar</searchLink><relatesTo>1</relatesTo><i> basudeb.ece@nitjsr.ac.in</i><br /><searchLink fieldCode="AR" term="%22Behera%2C+Basudeba%22">Behera, Basudeba</searchLink><relatesTo>1</relatesTo>
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  Data: <searchLink fieldCode="JN" term="%22Ferroelectrics%22">Ferroelectrics</searchLink>. 2023, Vol. 615 Issue 1, p132-142. 11p.
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  Data: <searchLink fieldCode="DE" term="%22Acoustic+surface+waves%22">Acoustic surface waves</searchLink><br /><searchLink fieldCode="DE" term="%22Resonators%22">Resonators</searchLink><br /><searchLink fieldCode="DE" term="%22Lithium+niobate%22">Lithium niobate</searchLink><br /><searchLink fieldCode="DE" term="%22Optical+resonators%22">Optical resonators</searchLink><br /><searchLink fieldCode="DE" term="%22Bandwidths%22">Bandwidths</searchLink><br /><searchLink fieldCode="DE" term="%22Quality+factor%22">Quality factor</searchLink><br /><searchLink fieldCode="DE" term="%22MEMS+resonators%22">MEMS resonators</searchLink><br /><searchLink fieldCode="DE" term="%22Bandpass+filters%22">Bandpass filters</searchLink>
– Name: Abstract
  Label: Abstract
  Group: Ab
  Data: In this research work, we have designed a heterostructure one-port surface acoustic wave (SAW) resonator. The multi-layer one port SAW resonator is made of a silicon (Si) substrate as base material, 128 rotated Y-cut X-propagated lithium niobate (LiNbO3) as piezoelectric substrate, and Inter Digital Transducers (IDTs) made of aluminium. This model is designed to operate on a wide frequency of 4-5 GHz with a resonance frequency of 4.74GHz. Various parameters are taken into consideration during the study and analysis such as high-quality factor, wider bandwidth, better electromechanical coupling coefficient, and a true Figure of merit (FoM). The obtained Quality factor and the electromechanical coupling coefficient (k²) of the designed model are 2700 and 0.18. By using the wide range of frequencies, the bandwidth for the designed model is 1.74MHz. The obtained results show that the device's performance of the one port multilayer SAW resonator using the Al/128οYXLiNbO3/Si multi-layered substrate exhibits a commercial application in the 5G wireless communication system. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Ferroelectrics is the property of Taylor & Francis Ltd and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.1080/00150193.2023.2243563
    Languages:
      – Code: eng
        Text: English
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      Pagination:
        PageCount: 11
        StartPage: 132
    Subjects:
      – SubjectFull: Acoustic surface waves
        Type: general
      – SubjectFull: Resonators
        Type: general
      – SubjectFull: Lithium niobate
        Type: general
      – SubjectFull: Optical resonators
        Type: general
      – SubjectFull: Bandwidths
        Type: general
      – SubjectFull: Quality factor
        Type: general
      – SubjectFull: MEMS resonators
        Type: general
      – SubjectFull: Bandpass filters
        Type: general
    Titles:
      – TitleFull: Design of heterostructure one-port SAW resonator with improved bandwidth using Si and LiNbO3 layer.
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            NameFull: Turuk, Baruna Kumar
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            NameFull: Behera, Basudeba
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            – D: 01
              M: 11
              Text: 2023
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              Y: 2023
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            – TitleFull: Ferroelectrics
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