APA (7th ed.) Citation

Fan, C., Hsin, T., Yu, X., & Lin, Z. (2024). Indium-zinc-tin-oxide thin-film-transistor reliability enhancement using fluoridation with CF4 reactive sputtering. Materials Science in Semiconductor Processing, 172, N.PAG. https://doi.org/10.1016/j.mssp.2023.108068

Chicago Style (17th ed.) Citation

Fan, Ching-Lin, Tzu-Chun Hsin, Xiang-Wei Yu, and Zhe-Chen Lin. "Indium-zinc-tin-oxide Thin-film-transistor Reliability Enhancement Using Fluoridation with CF4 Reactive Sputtering." Materials Science in Semiconductor Processing 172 (2024): N.PAG. https://doi.org/10.1016/j.mssp.2023.108068.

MLA (9th ed.) Citation

Fan, Ching-Lin, et al. "Indium-zinc-tin-oxide Thin-film-transistor Reliability Enhancement Using Fluoridation with CF4 Reactive Sputtering." Materials Science in Semiconductor Processing, vol. 172, 2024, p. N.PAG, https://doi.org/10.1016/j.mssp.2023.108068.