APA (7th ed.) Citation

Nikkuni, H., Ito, H., & Takatsuka, Y. (2024). Gas pressure dependence of optical and mechanical properties in a SiCO thin film for optical waveguide by reactive sputtering method. Electronics & Communications in Japan, 107(1), 1. https://doi.org/10.1002/ecj.12435

Chicago Style (17th ed.) Citation

Nikkuni, Hiroyuki, Hiroshi Ito, and Yu Takatsuka. "Gas Pressure Dependence of Optical and Mechanical Properties in a SiCO Thin Film for Optical Waveguide by Reactive Sputtering Method." Electronics & Communications in Japan 107, no. 1 (2024): 1. https://doi.org/10.1002/ecj.12435.

MLA (9th ed.) Citation

Nikkuni, Hiroyuki, et al. "Gas Pressure Dependence of Optical and Mechanical Properties in a SiCO Thin Film for Optical Waveguide by Reactive Sputtering Method." Electronics & Communications in Japan, vol. 107, no. 1, 2024, p. 1, https://doi.org/10.1002/ecj.12435.