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Gas pressure dependence of optical and mechanical properties in a SiCO thin film for optical waveguide by reactive sputtering method.

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Title: Gas pressure dependence of optical and mechanical properties in a SiCO thin film for optical waveguide by reactive sputtering method.
Authors: Nikkuni, Hiroyuki1 (AUTHOR) nikkuni@tokyo-ct.ac.jp, Ito, Hiroshi1 (AUTHOR), Takatsuka, Yu2 (AUTHOR)
Source: Electronics & Communications in Japan. Mar2024, Vol. 107 Issue 1, p1-6. 6p.
Subjects: Optical films, Reactive sputtering, Thin films, Young's modulus, Optical properties, Nanomechanics, Waveguides
Abstract: In this study, the gas pressure dependence of optical and mechanical characteristics in reactive sputtered SiCO thin films for optical guided‐wave pressure sensors was experimentally investigated. Thin films were fabricated by varying the gas pressure from 0.3 to 1.0 Pa at an oxygen flow ratio of 6%, and the gas pressure dependences was clarified. As the gas pressure increased, the optical bandgap of the SiCO thin film increased, resulting in a transparent SiCO films. On the other hand, the refractive index, young's modulus, and hardness decreased with increasing gas pressure. Combining this dependence with the oxygen inflow ratio dependence of the previous study, the first‐order approximation formula for the gas pressure and oxygen flow rate ratio for various film characteristics was obtained. Based on this equation, trajectories of equal bandgaps and equal young's moduli on the oxygen flow ratio—gas pressure plane were created on the oxygen influx ratio‐gas pressure coordinates, making it easy to fabricate waveguides with desired characteristics. [ABSTRACT FROM AUTHOR]
Copyright of Electronics & Communications in Japan is the property of Wiley-Blackwell and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
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  Label: Title
  Group: Ti
  Data: Gas pressure dependence of optical and mechanical properties in a SiCO thin film for optical waveguide by reactive sputtering method.
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  Data: <searchLink fieldCode="AR" term="%22Nikkuni%2C+Hiroyuki%22">Nikkuni, Hiroyuki</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> nikkuni@tokyo-ct.ac.jp</i><br /><searchLink fieldCode="AR" term="%22Ito%2C+Hiroshi%22">Ito, Hiroshi</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Takatsuka%2C+Yu%22">Takatsuka, Yu</searchLink><relatesTo>2</relatesTo> (AUTHOR)
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  Data: <searchLink fieldCode="JN" term="%22Electronics+%26+Communications+in+Japan%22">Electronics & Communications in Japan</searchLink>. Mar2024, Vol. 107 Issue 1, p1-6. 6p.
– Name: Subject
  Label: Subjects
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  Data: <searchLink fieldCode="DE" term="%22Optical+films%22">Optical films</searchLink><br /><searchLink fieldCode="DE" term="%22Reactive+sputtering%22">Reactive sputtering</searchLink><br /><searchLink fieldCode="DE" term="%22Thin+films%22">Thin films</searchLink><br /><searchLink fieldCode="DE" term="%22Young's+modulus%22">Young's modulus</searchLink><br /><searchLink fieldCode="DE" term="%22Optical+properties%22">Optical properties</searchLink><br /><searchLink fieldCode="DE" term="%22Nanomechanics%22">Nanomechanics</searchLink><br /><searchLink fieldCode="DE" term="%22Waveguides%22">Waveguides</searchLink>
– Name: Abstract
  Label: Abstract
  Group: Ab
  Data: In this study, the gas pressure dependence of optical and mechanical characteristics in reactive sputtered SiCO thin films for optical guided‐wave pressure sensors was experimentally investigated. Thin films were fabricated by varying the gas pressure from 0.3 to 1.0 Pa at an oxygen flow ratio of 6%, and the gas pressure dependences was clarified. As the gas pressure increased, the optical bandgap of the SiCO thin film increased, resulting in a transparent SiCO films. On the other hand, the refractive index, young's modulus, and hardness decreased with increasing gas pressure. Combining this dependence with the oxygen inflow ratio dependence of the previous study, the first‐order approximation formula for the gas pressure and oxygen flow rate ratio for various film characteristics was obtained. Based on this equation, trajectories of equal bandgaps and equal young's moduli on the oxygen flow ratio—gas pressure plane were created on the oxygen influx ratio‐gas pressure coordinates, making it easy to fabricate waveguides with desired characteristics. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Electronics & Communications in Japan is the property of Wiley-Blackwell and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1002/ecj.12435
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 6
        StartPage: 1
    Subjects:
      – SubjectFull: Optical films
        Type: general
      – SubjectFull: Reactive sputtering
        Type: general
      – SubjectFull: Thin films
        Type: general
      – SubjectFull: Young's modulus
        Type: general
      – SubjectFull: Optical properties
        Type: general
      – SubjectFull: Nanomechanics
        Type: general
      – SubjectFull: Waveguides
        Type: general
    Titles:
      – TitleFull: Gas pressure dependence of optical and mechanical properties in a SiCO thin film for optical waveguide by reactive sputtering method.
        Type: main
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          Name:
            NameFull: Nikkuni, Hiroyuki
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          Name:
            NameFull: Ito, Hiroshi
      – PersonEntity:
          Name:
            NameFull: Takatsuka, Yu
    IsPartOfRelationships:
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          Dates:
            – D: 01
              M: 03
              Text: Mar2024
              Type: published
              Y: 2024
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              Value: 107
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              Value: 1
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            – TitleFull: Electronics & Communications in Japan
              Type: main
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