Angular distribution of species in pulsed electron beam deposition of BaxSr1-xTiO3.
Saved in:
| Title: | Angular distribution of species in pulsed electron beam deposition of BaxSr1-xTiO3. |
|---|---|
| Authors: | Dobrin, D.1 (AUTHOR), Burducea, I.2 (AUTHOR), Iancu, D.2 (AUTHOR), Burducea, C.2 (AUTHOR), Gherendi, F.1 (AUTHOR), Nistor, M.1 (AUTHOR) magda.nistor@inflpr.ro |
| Source: | Applied Surface Science. Jun2024, Vol. 657, pN.PAG-N.PAG. 1p. |
| Subjects: | Electron beam deposition, Angular distribution (Nuclear physics), Rutherford backscattering spectrometry, Species distribution, Pulsed power systems, Electron beams |
| Abstract: | [Display omitted] • Angular thickness and composition profiles of Ba x Sr 1-x TiO 3 (x = 0.2) thin films in PED. • Forward shaped peaks in PED like in PLD for film thickness profiles. • Measurable thickness up to 80-90° for major axis and 25° for minor axis. • The film composition depends on the element and background gas used. The angular thickness and composition profiles of thin films obtained by irradiating a Ba x Sr 1-x TiO 3 (x = 0.2) target with a pulsed electron beam were investigated by Rutherford backscattering spectrometry for argon and oxygen background gases at a pressure of about 10-2 mbar. A "semi-sphere" holder was used, resulting in a fixed target to substrate distance of about 40 mm. The film thickness profiles have forward shaped peaks, with measurable thickness up to 80-90° for major axis and 25° for minor axis, and presents similar trend for both argon and oxygen background gas. The analysis of the congruent transfer of the elements from the target as a function of the angle showed that the film composition is not uniform over this wide angular range and differs with respect of the ablated target depending on the element used and on background gas. [ABSTRACT FROM AUTHOR] |
| Copyright of Applied Surface Science is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.) | |
| Database: | Engineering Source |
| FullText | Text: Availability: 0 |
|---|---|
| Header | DbId: egs DbLabel: Engineering Source An: 176034104 AccessLevel: 6 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
| IllustrationInfo | |
| Items | – Name: Title Label: Title Group: Ti Data: Angular distribution of species in pulsed electron beam deposition of BaxSr1-xTiO3. – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AR" term="%22Dobrin%2C+D%2E%22">Dobrin, D.</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Burducea%2C+I%2E%22">Burducea, I.</searchLink><relatesTo>2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Iancu%2C+D%2E%22">Iancu, D.</searchLink><relatesTo>2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Burducea%2C+C%2E%22">Burducea, C.</searchLink><relatesTo>2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Gherendi%2C+F%2E%22">Gherendi, F.</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Nistor%2C+M%2E%22">Nistor, M.</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> magda.nistor@inflpr.ro</i> – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22Applied+Surface+Science%22">Applied Surface Science</searchLink>. Jun2024, Vol. 657, pN.PAG-N.PAG. 1p. – Name: Subject Label: Subjects Group: Su Data: <searchLink fieldCode="DE" term="%22Electron+beam+deposition%22">Electron beam deposition</searchLink><br /><searchLink fieldCode="DE" term="%22Angular+distribution+%28Nuclear+physics%29%22">Angular distribution (Nuclear physics)</searchLink><br /><searchLink fieldCode="DE" term="%22Rutherford+backscattering+spectrometry%22">Rutherford backscattering spectrometry</searchLink><br /><searchLink fieldCode="DE" term="%22Species+distribution%22">Species distribution</searchLink><br /><searchLink fieldCode="DE" term="%22Pulsed+power+systems%22">Pulsed power systems</searchLink><br /><searchLink fieldCode="DE" term="%22Electron+beams%22">Electron beams</searchLink> – Name: Abstract Label: Abstract Group: Ab Data: [Display omitted] • Angular thickness and composition profiles of Ba x Sr 1-x TiO 3 (x = 0.2) thin films in PED. • Forward shaped peaks in PED like in PLD for film thickness profiles. • Measurable thickness up to 80-90° for major axis and 25° for minor axis. • The film composition depends on the element and background gas used. The angular thickness and composition profiles of thin films obtained by irradiating a Ba x Sr 1-x TiO 3 (x = 0.2) target with a pulsed electron beam were investigated by Rutherford backscattering spectrometry for argon and oxygen background gases at a pressure of about 10-2 mbar. A "semi-sphere" holder was used, resulting in a fixed target to substrate distance of about 40 mm. The film thickness profiles have forward shaped peaks, with measurable thickness up to 80-90° for major axis and 25° for minor axis, and presents similar trend for both argon and oxygen background gas. The analysis of the congruent transfer of the elements from the target as a function of the angle showed that the film composition is not uniform over this wide angular range and differs with respect of the ablated target depending on the element used and on background gas. [ABSTRACT FROM AUTHOR] – Name: AbstractSuppliedCopyright Label: Group: Ab Data: <i>Copyright of Applied Surface Science is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.) |
| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=egs&AN=176034104 |
| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1016/j.apsusc.2024.159757 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 1 StartPage: N.PAG Subjects: – SubjectFull: Electron beam deposition Type: general – SubjectFull: Angular distribution (Nuclear physics) Type: general – SubjectFull: Rutherford backscattering spectrometry Type: general – SubjectFull: Species distribution Type: general – SubjectFull: Pulsed power systems Type: general – SubjectFull: Electron beams Type: general Titles: – TitleFull: Angular distribution of species in pulsed electron beam deposition of BaxSr1-xTiO3. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Dobrin, D. – PersonEntity: Name: NameFull: Burducea, I. – PersonEntity: Name: NameFull: Iancu, D. – PersonEntity: Name: NameFull: Burducea, C. – PersonEntity: Name: NameFull: Gherendi, F. – PersonEntity: Name: NameFull: Nistor, M. IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 06 Text: Jun2024 Type: published Y: 2024 Identifiers: – Type: issn-print Value: 01694332 Numbering: – Type: volume Value: 657 Titles: – TitleFull: Applied Surface Science Type: main |
| ResultId | 1 |
