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Proton beam writing using the high energy ion nanoprobe LIPSION

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Title: Proton beam writing using the high energy ion nanoprobe LIPSION
Authors: Menzel, F.1 fmenzel@physik.uni-leipzig.de, Spemann, D.1, Lenzner, J.2, Vogt, J.1, Butz, T.1
Source: Nuclear Instruments & Methods in Physics Research Section B. Apr2005, Vol. 231 Issue 1-4, p372-377. 6p.
Subjects: Ions, Atoms, Protons, Baryons
Abstract: Abstract: Proton beam writing (PBW) is a very unique technique capable of the direct creation of three dimensional structures with a very high aspect ratio. Since the high energy ion nanoprobe LIPSION has a very high spatial resolution and is therefore well suited for the creation of structures in the micrometre range or below, it is planned to establish the PBW technique at the University of Leipzig. The results of the first proton beam writing experiments at the LIPSION nanoprobe are presented in this article. Structures with high aspect ratio and smooth side walls with an edge definition of ∼0.2μm were created in negative SU-8 photo resist using 2.25MeV protons. Furthermore, investigations were carried out concerning the mechanical stability of single free standing walls in order to collect information for the targeted production of samples with smaller feature sizes in the submicrometre range. Up to now, wall widths down to 1.5μm were achieved. However, smaller feature sizes could not be obtained due to beam spot fluctuations which enlarge the wall width by a factor of three. Self-supported structures were produced using 2.25MeV protons and subsequently 1.5MeV helium ions demonstrating the stability and accuracy of these real three dimensional structures. In addition, different methods for online dose normalization were tested showing that ionoluminescence is the most suitable method for this purpose. [Copyright &y& Elsevier]
Copyright of Nuclear Instruments & Methods in Physics Research Section B is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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DbLabel: Engineering Source
An: 17820149
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PubType: Academic Journal
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  Data: Proton beam writing using the high energy ion nanoprobe LIPSION
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  Data: <searchLink fieldCode="AR" term="%22Menzel%2C+F%2E%22">Menzel, F.</searchLink><relatesTo>1</relatesTo><i> fmenzel@physik.uni-leipzig.de</i><br /><searchLink fieldCode="AR" term="%22Spemann%2C+D%2E%22">Spemann, D.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Lenzner%2C+J%2E%22">Lenzner, J.</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AR" term="%22Vogt%2C+J%2E%22">Vogt, J.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Butz%2C+T%2E%22">Butz, T.</searchLink><relatesTo>1</relatesTo>
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  Data: <searchLink fieldCode="JN" term="%22Nuclear+Instruments+%26+Methods+in+Physics+Research+Section+B%22">Nuclear Instruments & Methods in Physics Research Section B</searchLink>. Apr2005, Vol. 231 Issue 1-4, p372-377. 6p.
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  Data: <searchLink fieldCode="DE" term="%22Ions%22">Ions</searchLink><br /><searchLink fieldCode="DE" term="%22Atoms%22">Atoms</searchLink><br /><searchLink fieldCode="DE" term="%22Protons%22">Protons</searchLink><br /><searchLink fieldCode="DE" term="%22Baryons%22">Baryons</searchLink>
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  Data: Abstract: Proton beam writing (PBW) is a very unique technique capable of the direct creation of three dimensional structures with a very high aspect ratio. Since the high energy ion nanoprobe LIPSION has a very high spatial resolution and is therefore well suited for the creation of structures in the micrometre range or below, it is planned to establish the PBW technique at the University of Leipzig. The results of the first proton beam writing experiments at the LIPSION nanoprobe are presented in this article. Structures with high aspect ratio and smooth side walls with an edge definition of ∼0.2μm were created in negative SU-8 photo resist using 2.25MeV protons. Furthermore, investigations were carried out concerning the mechanical stability of single free standing walls in order to collect information for the targeted production of samples with smaller feature sizes in the submicrometre range. Up to now, wall widths down to 1.5μm were achieved. However, smaller feature sizes could not be obtained due to beam spot fluctuations which enlarge the wall width by a factor of three. Self-supported structures were produced using 2.25MeV protons and subsequently 1.5MeV helium ions demonstrating the stability and accuracy of these real three dimensional structures. In addition, different methods for online dose normalization were tested showing that ionoluminescence is the most suitable method for this purpose. [Copyright &y& Elsevier]
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  Data: <i>Copyright of Nuclear Instruments & Methods in Physics Research Section B is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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              Text: Apr2005
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