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Testing the accuracy of low-beam-energy electron-excited X-ray microanalysis with energy-dispersive spectrometry.

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Title: Testing the accuracy of low-beam-energy electron-excited X-ray microanalysis with energy-dispersive spectrometry.
Authors: Newbury, Dale E.1 (AUTHOR) dale.newbury@nist.gov, Ritchie, Nicholas W. M.1 (AUTHOR)
Source: Journal of Materials Science. Oct2024, Vol. 59 Issue 40, p19088-19111. 24p.
Subjects: X-ray microanalysis, Periodic table of the elements, Alloys, Elemental analysis, Reference sources
Abstract: The accuracy of electron-excited X-ray microanalysis with energy-dispersive spectrometry (EDS) has been tested in the low beam energy range, specifically at an incident beam energy of 5 keV, which is the lowest beam energy for which a useful characteristic X-ray peak can be excited for all elements of the periodic table, excepting H and He. Elemental analysis results are reported for certified reference materials (CRM), stoichiometric compounds, minerals, and metal alloys of independently known or measured composition which had microscopic homogeneity suitable for microanalysis. Two-hundred sixty-three concentration measurements for 39 elements in 113 materials were determined following the k-ratio protocol and using the EDS analytical software NIST DTSA-II. The accuracy of the results, as characterized by the relative deviation from expected value (RDEV) metric, was such that more than 98% of the results were found to be captured within a range of ±5% RDEV, while 82% of the results fell in the range -2% to 2% RDEV. [ABSTRACT FROM AUTHOR]
Copyright of Journal of Materials Science is the property of Springer Nature and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
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  Data: Testing the accuracy of low-beam-energy electron-excited X-ray microanalysis with energy-dispersive spectrometry.
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  Data: <searchLink fieldCode="AR" term="%22Newbury%2C+Dale+E%2E%22">Newbury, Dale E.</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> dale.newbury@nist.gov</i><br /><searchLink fieldCode="AR" term="%22Ritchie%2C+Nicholas+W%2E+M%2E%22">Ritchie, Nicholas W. M.</searchLink><relatesTo>1</relatesTo> (AUTHOR)
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Materials+Science%22">Journal of Materials Science</searchLink>. Oct2024, Vol. 59 Issue 40, p19088-19111. 24p.
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  Data: <searchLink fieldCode="DE" term="%22X-ray+microanalysis%22">X-ray microanalysis</searchLink><br /><searchLink fieldCode="DE" term="%22Periodic+table+of+the+elements%22">Periodic table of the elements</searchLink><br /><searchLink fieldCode="DE" term="%22Alloys%22">Alloys</searchLink><br /><searchLink fieldCode="DE" term="%22Elemental+analysis%22">Elemental analysis</searchLink><br /><searchLink fieldCode="DE" term="%22Reference+sources%22">Reference sources</searchLink>
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  Label: Abstract
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  Data: The accuracy of electron-excited X-ray microanalysis with energy-dispersive spectrometry (EDS) has been tested in the low beam energy range, specifically at an incident beam energy of 5 keV, which is the lowest beam energy for which a useful characteristic X-ray peak can be excited for all elements of the periodic table, excepting H and He. Elemental analysis results are reported for certified reference materials (CRM), stoichiometric compounds, minerals, and metal alloys of independently known or measured composition which had microscopic homogeneity suitable for microanalysis. Two-hundred sixty-three concentration measurements for 39 elements in 113 materials were determined following the k-ratio protocol and using the EDS analytical software NIST DTSA-II. The accuracy of the results, as characterized by the relative deviation from expected value (RDEV) metric, was such that more than 98% of the results were found to be captured within a range of ±5% RDEV, while 82% of the results fell in the range -2% to 2% RDEV. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
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  Data: <i>Copyright of Journal of Materials Science is the property of Springer Nature and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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        Value: 10.1007/s10853-024-10285-4
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        Text: English
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      – SubjectFull: Periodic table of the elements
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              Text: Oct2024
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