Super-stealth dicing technology opens a new era for nanofabrication of transparent solids.

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Bibliographic Details
Title: Super-stealth dicing technology opens a new era for nanofabrication of transparent solids.
Authors: Wen, Xixing1 (AUTHOR), Tsang, Sai-Wing1,2 (AUTHOR) saitsang@cityu.edu.hk, Xu, Xiuwen1 (AUTHOR) xuxiuwen@njupt.edu.cn
Source: Science Bulletin. Nov2024, Vol. 69 Issue 21, p3314-3317. 4p.
Subjects: Transparent solids, Nanofabrication
Database: Engineering Source
Description
ISSN:20959273
DOI:10.1016/j.scib.2024.08.026