Multiphysics Simulation of an Electrostatics-Rotary MEMS Stepper Motor.
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| Title: | Multiphysics Simulation of an Electrostatics-Rotary MEMS Stepper Motor. |
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| Authors: | Abarca-Jiménez, G. S.1, Sánchez-Márquez, L.2, Mares-Carreño, J.1, Reyes-Barranca, M. A.2, Corona-Ramírez, L. G.3 |
| Source: | International Journal of Multiphysics. 2024, Vol. 18 Issue 2, p527-537. 11p. |
| Subjects: | Electrostatic actuators, Solid mechanics, Integrated circuits, Electrostatics, Stators |
| Abstract: | This paper shows the multiphysics simulation process of a rotary MEMS stepper motor with electrostatic actuation, where the solid mechanics, electrostatics, and moving mesh simulations through COMSOL are considered in a time-dependent study. The rotary MEMS motor comprises the aluminum structural layer from a 0.5μm CMOS technology used for integrated circuit fabrication. Both the rotor and the stator are immersed in a dielectric; for this reason, the simulation requires a moving mesh to model the electrical characteristics of the medium. A mesh convergence study is conducted to ensure the accuracy and mesh independence of the results. The simulation also considers the frequency of the stator electrodes alternating signal and the frequency response of the rotor to define the solver time stepping. Through this simulation, it was possible to verify that the micrometric electrostatic actuator has an angular displacement with a linear trend, which allows the proposed design to be verified. [ABSTRACT FROM AUTHOR] |
| Copyright of International Journal of Multiphysics is the property of MULTIPHYSICS and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.) | |
| Database: | Engineering Source |
| FullText | Links: – Type: pdflink Text: Availability: 0 |
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| Header | DbId: egs DbLabel: Engineering Source An: 180714269 AccessLevel: 6 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| Items | – Name: Title Label: Title Group: Ti Data: Multiphysics Simulation of an Electrostatics-Rotary MEMS Stepper Motor. – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AR" term="%22Abarca-Jiménez%2C+G%2E+S%2E%22">Abarca-Jiménez, G. S.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Sánchez-Márquez%2C+L%2E%22">Sánchez-Márquez, L.</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AR" term="%22Mares-Carreño%2C+J%2E%22">Mares-Carreño, J.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Reyes-Barranca%2C+M%2E+A%2E%22">Reyes-Barranca, M. A.</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AR" term="%22Corona-Ramírez%2C+L%2E+G%2E%22">Corona-Ramírez, L. G.</searchLink><relatesTo>3</relatesTo> – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22International+Journal+of+Multiphysics%22">International Journal of Multiphysics</searchLink>. 2024, Vol. 18 Issue 2, p527-537. 11p. – Name: Subject Label: Subjects Group: Su Data: <searchLink fieldCode="DE" term="%22Electrostatic+actuators%22">Electrostatic actuators</searchLink><br /><searchLink fieldCode="DE" term="%22Solid+mechanics%22">Solid mechanics</searchLink><br /><searchLink fieldCode="DE" term="%22Integrated+circuits%22">Integrated circuits</searchLink><br /><searchLink fieldCode="DE" term="%22Electrostatics%22">Electrostatics</searchLink><br /><searchLink fieldCode="DE" term="%22Stators%22">Stators</searchLink> – Name: Abstract Label: Abstract Group: Ab Data: This paper shows the multiphysics simulation process of a rotary MEMS stepper motor with electrostatic actuation, where the solid mechanics, electrostatics, and moving mesh simulations through COMSOL are considered in a time-dependent study. The rotary MEMS motor comprises the aluminum structural layer from a 0.5μm CMOS technology used for integrated circuit fabrication. Both the rotor and the stator are immersed in a dielectric; for this reason, the simulation requires a moving mesh to model the electrical characteristics of the medium. A mesh convergence study is conducted to ensure the accuracy and mesh independence of the results. The simulation also considers the frequency of the stator electrodes alternating signal and the frequency response of the rotor to define the solver time stepping. Through this simulation, it was possible to verify that the micrometric electrostatic actuator has an angular displacement with a linear trend, which allows the proposed design to be verified. [ABSTRACT FROM AUTHOR] – Name: AbstractSuppliedCopyright Label: Group: Ab Data: <i>Copyright of International Journal of Multiphysics is the property of MULTIPHYSICS and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.) |
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| RecordInfo | BibRecord: BibEntity: Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 11 StartPage: 527 Subjects: – SubjectFull: Electrostatic actuators Type: general – SubjectFull: Solid mechanics Type: general – SubjectFull: Integrated circuits Type: general – SubjectFull: Electrostatics Type: general – SubjectFull: Stators Type: general Titles: – TitleFull: Multiphysics Simulation of an Electrostatics-Rotary MEMS Stepper Motor. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Abarca-Jiménez, G. S. – PersonEntity: Name: NameFull: Sánchez-Márquez, L. – PersonEntity: Name: NameFull: Mares-Carreño, J. – PersonEntity: Name: NameFull: Reyes-Barranca, M. A. – PersonEntity: Name: NameFull: Corona-Ramírez, L. G. IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 04 Text: 2024 Type: published Y: 2024 Identifiers: – Type: issn-print Value: 17509548 Numbering: – Type: volume Value: 18 – Type: issue Value: 2 Titles: – TitleFull: International Journal of Multiphysics Type: main |
| ResultId | 1 |
