Multiphysics Simulation of an Electrostatics-Rotary MEMS Stepper Motor. - Abarca-Jiménez, G. S.; Sánchez-Márquez, L.; Mares-Carreño, J.; Reyes-Barranca, M. A.; Corona-Ramírez, L. G. (International Journal of Multiphysics, 2024)