Optimization of Soft X-Ray Fresnel Zone Plate Fabrication Through Joint Electron Beam Lithography and Cryo-Etching Techniques. - Labani, Maha; Clericò, Vito; Diez, Enrique; Gatti, Giancarlo; Amado, Mario; Pérez-Rodríguez, Ana (Nanomaterials (2079-4991), 2024)