Optimization of Soft X-Ray Fresnel Zone Plate Fabrication Through Joint Electron Beam Lithography and Cryo-Etching Techniques.
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| Title: | Optimization of Soft X-Ray Fresnel Zone Plate Fabrication Through Joint Electron Beam Lithography and Cryo-Etching Techniques. |
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| Authors: | Labani, Maha1 (AUTHOR) idu018684@usal.es, Clericò, Vito1 (AUTHOR), Diez, Enrique1 (AUTHOR), Gatti, Giancarlo2 (AUTHOR), Amado, Mario1,3 (AUTHOR), Pérez-Rodríguez, Ana1 (AUTHOR) perez.rodriguez.ana@usal.es |
| Source: | Nanomaterials (2079-4991). Dec2024, Vol. 14 Issue 23, p1898. 22p. |
| Subjects: | Electron beam lithography, Soft X rays, Optical resolution, Chromium, Photons |
| Abstract: | The ability to manufacture complex 3D structures with nanometer-scale resolution, such as Fresnel Zone Plates (FZPs), is crucial to achieve state-of-the-art control in X-ray sources for use in a diverse range of cutting-edge applications. This study demonstrates a novel approach combining Electron Beam Lithography (EBL) and cryoetching to produce silicon-based FZP prototypes as a test bench to assess the strong points and limitations of this fabrication method. Through this method, we obtained FZPs with 100 zones, a diameter of 20 µm, and an outermost zone width of 50 nm, resulting in a high aspect ratio that is suitable for use across a range of photon energies. The process incorporates a chromium mask in the EBL stage, enhancing microstructure precision and mitigating pattern collapse challenges. This minimized issues of under- and over-etching, producing well-defined patterns with a nanometer-scale resolution and low roughness. The refined process thus holds promise for achieving improved optical resolution and efficiency in FZPs, making it viable for the fabrication of high-performance, nanometer-scale devices. [ABSTRACT FROM AUTHOR] |
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| Database: | Engineering Source |
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