A Novel Approach of −80 °C Cascade Refrigeration System Using Non-Flammable Quaternary Refrigerants for Semiconductor Process Applications.

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Title: A Novel Approach of −80 °C Cascade Refrigeration System Using Non-Flammable Quaternary Refrigerants for Semiconductor Process Applications.
Authors: Lee, Su-Been1 (AUTHOR) sonch@pknu.ac.kr, Son, Chang-Hyo1 (AUTHOR), Lee, Joon-Hyuk1 (AUTHOR) joonhyukcap3@naver.com
Source: Energies (19961073). Dec2024, Vol. 17 Issue 23, p6178. 22p.
Subjects: Semiconductor technology, Boiling-points, Low temperatures, Refrigerants, Semiconductors, Exergy
Abstract: Ultra-low temperature chillers have seen increasing demand with the advancement of semiconductor technology. Mixed refrigerant (MR) cascade refrigeration systems (CRSs) are widely utilized for their stability and high cooling performance at low temperatures. Extensive research has been conducted on optimizing MR, which has a significant impact on CRS performance. However, most previous studies have either fixed the system pressure or used the refrigeration effect as the sole performance indicator. This did not account for the potential of achieving higher performance with an optimal MR composition at the same target temperature. In this study, a detailed parametric analysis was performed to investigate how the mass fractions of high-, mid-, and low boiling point refrigerants affect the coefficient of performance (COP) and exergy in ultra-low temperature CRSs without fixing the suction pressure. The analysis revealed that at the point of maximum COP, the refrigeration effect was relatively low, highlighting the limitations of using the refrigeration effect alone as a performance indicator. Additionally, COP was found to inversely correlate with total exergy destruction. As cascade temperature increases, COP tends to decrease, emphasizing the need for appropriate cascade temperature selection for MR CRS performance. This study introduces a novel approach to optimizing MR composition under various operating conditions, contributing to the advancement of ultra-low temperature CRSs. [ABSTRACT FROM AUTHOR]
Copyright of Energies (19961073) is the property of MDPI and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
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  Data: A Novel Approach of −80 °C Cascade Refrigeration System Using Non-Flammable Quaternary Refrigerants for Semiconductor Process Applications.
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  Data: <searchLink fieldCode="AR" term="%22Lee%2C+Su-Been%22">Lee, Su-Been</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> sonch@pknu.ac.kr</i><br /><searchLink fieldCode="AR" term="%22Son%2C+Chang-Hyo%22">Son, Chang-Hyo</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Lee%2C+Joon-Hyuk%22">Lee, Joon-Hyuk</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> joonhyukcap3@naver.com</i>
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  Data: <searchLink fieldCode="JN" term="%22Energies+%2819961073%29%22">Energies (19961073)</searchLink>. Dec2024, Vol. 17 Issue 23, p6178. 22p.
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  Data: <searchLink fieldCode="DE" term="%22Semiconductor+technology%22">Semiconductor technology</searchLink><br /><searchLink fieldCode="DE" term="%22Boiling-points%22">Boiling-points</searchLink><br /><searchLink fieldCode="DE" term="%22Low+temperatures%22">Low temperatures</searchLink><br /><searchLink fieldCode="DE" term="%22Refrigerants%22">Refrigerants</searchLink><br /><searchLink fieldCode="DE" term="%22Semiconductors%22">Semiconductors</searchLink><br /><searchLink fieldCode="DE" term="%22Exergy%22">Exergy</searchLink>
– Name: Abstract
  Label: Abstract
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  Data: Ultra-low temperature chillers have seen increasing demand with the advancement of semiconductor technology. Mixed refrigerant (MR) cascade refrigeration systems (CRSs) are widely utilized for their stability and high cooling performance at low temperatures. Extensive research has been conducted on optimizing MR, which has a significant impact on CRS performance. However, most previous studies have either fixed the system pressure or used the refrigeration effect as the sole performance indicator. This did not account for the potential of achieving higher performance with an optimal MR composition at the same target temperature. In this study, a detailed parametric analysis was performed to investigate how the mass fractions of high-, mid-, and low boiling point refrigerants affect the coefficient of performance (COP) and exergy in ultra-low temperature CRSs without fixing the suction pressure. The analysis revealed that at the point of maximum COP, the refrigeration effect was relatively low, highlighting the limitations of using the refrigeration effect alone as a performance indicator. Additionally, COP was found to inversely correlate with total exergy destruction. As cascade temperature increases, COP tends to decrease, emphasizing the need for appropriate cascade temperature selection for MR CRS performance. This study introduces a novel approach to optimizing MR composition under various operating conditions, contributing to the advancement of ultra-low temperature CRSs. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Energies (19961073) is the property of MDPI and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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        Value: 10.3390/en17236178
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      – Code: eng
        Text: English
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        PageCount: 22
        StartPage: 6178
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      – SubjectFull: Semiconductor technology
        Type: general
      – SubjectFull: Boiling-points
        Type: general
      – SubjectFull: Low temperatures
        Type: general
      – SubjectFull: Refrigerants
        Type: general
      – SubjectFull: Semiconductors
        Type: general
      – SubjectFull: Exergy
        Type: general
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      – TitleFull: A Novel Approach of −80 °C Cascade Refrigeration System Using Non-Flammable Quaternary Refrigerants for Semiconductor Process Applications.
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            NameFull: Lee, Su-Been
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            NameFull: Son, Chang-Hyo
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            NameFull: Lee, Joon-Hyuk
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            – D: 01
              M: 12
              Text: Dec2024
              Type: published
              Y: 2024
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