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A Microfabrication Technique for High-Performance Diffractive Optical Elements Tailored for Numerical Simulation.

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Title: A Microfabrication Technique for High-Performance Diffractive Optical Elements Tailored for Numerical Simulation.
Authors: Dai, Xingang1 (AUTHOR), Hu, Yanjun1 (AUTHOR), Niu, Bowen1 (AUTHOR), Dai, Qun1 (AUTHOR), Ao, Yu1 (AUTHOR), Zhang, Hongru2 (AUTHOR), Jing, Gaoshan2 (AUTHOR) jinggaoshan@ime.ac.cn, Li, Yuan3 (AUTHOR), Fan, Guofang1 (AUTHOR) jinggaoshan@ime.ac.cn
Source: Nanomaterials (2079-4991). Jan2025, Vol. 15 Issue 2, p138. 13p.
Subjects: Diffractive optical elements, Optical radar, LIDAR, Optical diffraction, Semiconductor devices
Abstract: Diffractive optical elements (DOEs) are specialized optical components that manipulate light through diffraction for various applications, including holography, spectroscopy, augmented reality (AR) and virtual reality (VR), and light detection and ranging (LiDAR). The performance of DOEs is highly determined by fabricated materials and fabrication methods, in addition to the numerical simulation design. This paper presents a microfabrication technique optimized for DOEs, enabling precise control of critical parameters, such as refractive index (RI) and thickness. Using photolithography, we fabricated high-precision photoresist patterns on silicon and sapphire substrates, with 3 × 3 and 3 × 5 DOE beam splitter as examples. The results show a strong match between simulation and experimental data, with discrepancies of just 0.53% and 0.57% for DOE on silicon and sapphire substrates, respectively. This approach offers potential for advancing high-performance DOE devices in semiconductor manufacturing, supporting next-generation optical systems. [ABSTRACT FROM AUTHOR]
Copyright of Nanomaterials (2079-4991) is the property of MDPI and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
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  Data: A Microfabrication Technique for High-Performance Diffractive Optical Elements Tailored for Numerical Simulation.
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  Data: <searchLink fieldCode="AR" term="%22Dai%2C+Xingang%22">Dai, Xingang</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Hu%2C+Yanjun%22">Hu, Yanjun</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Niu%2C+Bowen%22">Niu, Bowen</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Dai%2C+Qun%22">Dai, Qun</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Ao%2C+Yu%22">Ao, Yu</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Zhang%2C+Hongru%22">Zhang, Hongru</searchLink><relatesTo>2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Jing%2C+Gaoshan%22">Jing, Gaoshan</searchLink><relatesTo>2</relatesTo> (AUTHOR)<i> jinggaoshan@ime.ac.cn</i><br /><searchLink fieldCode="AR" term="%22Li%2C+Yuan%22">Li, Yuan</searchLink><relatesTo>3</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Fan%2C+Guofang%22">Fan, Guofang</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> jinggaoshan@ime.ac.cn</i>
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  Data: <searchLink fieldCode="JN" term="%22Nanomaterials+%282079-4991%29%22">Nanomaterials (2079-4991)</searchLink>. Jan2025, Vol. 15 Issue 2, p138. 13p.
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  Data: <searchLink fieldCode="DE" term="%22Diffractive+optical+elements%22">Diffractive optical elements</searchLink><br /><searchLink fieldCode="DE" term="%22Optical+radar%22">Optical radar</searchLink><br /><searchLink fieldCode="DE" term="%22LIDAR%22">LIDAR</searchLink><br /><searchLink fieldCode="DE" term="%22Optical+diffraction%22">Optical diffraction</searchLink><br /><searchLink fieldCode="DE" term="%22Semiconductor+devices%22">Semiconductor devices</searchLink>
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  Label: Abstract
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  Data: Diffractive optical elements (DOEs) are specialized optical components that manipulate light through diffraction for various applications, including holography, spectroscopy, augmented reality (AR) and virtual reality (VR), and light detection and ranging (LiDAR). The performance of DOEs is highly determined by fabricated materials and fabrication methods, in addition to the numerical simulation design. This paper presents a microfabrication technique optimized for DOEs, enabling precise control of critical parameters, such as refractive index (RI) and thickness. Using photolithography, we fabricated high-precision photoresist patterns on silicon and sapphire substrates, with 3 × 3 and 3 × 5 DOE beam splitter as examples. The results show a strong match between simulation and experimental data, with discrepancies of just 0.53% and 0.57% for DOE on silicon and sapphire substrates, respectively. This approach offers potential for advancing high-performance DOE devices in semiconductor manufacturing, supporting next-generation optical systems. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
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  Data: <i>Copyright of Nanomaterials (2079-4991) is the property of MDPI and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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        Value: 10.3390/nano15020138
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        Text: English
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        PageCount: 13
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      – SubjectFull: Diffractive optical elements
        Type: general
      – SubjectFull: Optical radar
        Type: general
      – SubjectFull: LIDAR
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      – SubjectFull: Optical diffraction
        Type: general
      – SubjectFull: Semiconductor devices
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      – TitleFull: A Microfabrication Technique for High-Performance Diffractive Optical Elements Tailored for Numerical Simulation.
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              M: 01
              Text: Jan2025
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