Investigation of structured TiAlN- and TiO2-coatings with moth-eye-like surface morphologies
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| Title: | Investigation of structured TiAlN- and TiO |
|---|---|
| Authors: | Burmeister, F.1 burm@iwm.fhg.de, Schäffer, E.1, Kleer, G.1, Döll, W.1, Bläsi, B.2, Gombert, A.2 |
| Source: | Surface & Coatings Technology. Oct2005, Vol. 200 Issue 1-4, p1088-1092. 5p. |
| Subjects: | Thin films, Atomic force microscopy, Coating processes, Surfaces (Technology) |
| Abstract: | Abstract: This paper is to report on the development and investigation of a specific type of growth mode and surface morphology of PVD-coatings, namely a columnar growth mode where the individual columns are terminated by pyramid-shaped tips. TiAlN was chosen as a representative of the cubic crystal system, TiO2 as a representative of the tetragonal crystal system. The coatings were sputter-deposited on silicon and steel substrates by a reactive RF-magnetron process under variation of total pressure, reactive gas flow and RF-power. Investigations of microstructure and surface morphology were carried out with electron microscopy (SEM), atomic force microscopy (AFM) and X-ray diffraction techniques (XRD) and are described in more detail for TiO2-coatings. The individual columns with diameters between 100 and 500 nm were terminated by pyramid-shaped tips where the geometric forms of the pyramids were determined by the crystal system of the coating material. A power law was found for the dependance of the mean column diameter on coating thickness in qualitative agreement with phenomenological models for thin film growth. Both coating materials were deposited on steel tools and hot embossed into the surfaces of PMMA-clear-view screens. The resulting screen''s surface morphologies proved to be comparable to the anti-reflective surfaces of moth-eyes and also exhibited a pronounced decrease in reflectivity. [Copyright &y& Elsevier] |
| Copyright of Surface & Coatings Technology is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.) | |
| Database: | Engineering Source |
| FullText | Text: Availability: 0 |
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| Header | DbId: egs DbLabel: Engineering Source An: 18282362 AccessLevel: 6 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| Items | – Name: Title Label: Title Group: Ti Data: Investigation of structured TiAlN- and TiO<subscript>2</subscript>-coatings with moth-eye-like surface morphologies – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AR" term="%22Burmeister%2C+F%2E%22">Burmeister, F.</searchLink><relatesTo>1</relatesTo><i> burm@iwm.fhg.de</i><br /><searchLink fieldCode="AR" term="%22Schäffer%2C+E%2E%22">Schäffer, E.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Kleer%2C+G%2E%22">Kleer, G.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Döll%2C+W%2E%22">Döll, W.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Bläsi%2C+B%2E%22">Bläsi, B.</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AR" term="%22Gombert%2C+A%2E%22">Gombert, A.</searchLink><relatesTo>2</relatesTo> – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22Surface+%26+Coatings+Technology%22">Surface & Coatings Technology</searchLink>. Oct2005, Vol. 200 Issue 1-4, p1088-1092. 5p. – Name: Subject Label: Subjects Group: Su Data: <searchLink fieldCode="DE" term="%22Thin+films%22">Thin films</searchLink><br /><searchLink fieldCode="DE" term="%22Atomic+force+microscopy%22">Atomic force microscopy</searchLink><br /><searchLink fieldCode="DE" term="%22Coating+processes%22">Coating processes</searchLink><br /><searchLink fieldCode="DE" term="%22Surfaces+%28Technology%29%22">Surfaces (Technology)</searchLink> – Name: Abstract Label: Abstract Group: Ab Data: Abstract: This paper is to report on the development and investigation of a specific type of growth mode and surface morphology of PVD-coatings, namely a columnar growth mode where the individual columns are terminated by pyramid-shaped tips. TiAlN was chosen as a representative of the cubic crystal system, TiO2 as a representative of the tetragonal crystal system. The coatings were sputter-deposited on silicon and steel substrates by a reactive RF-magnetron process under variation of total pressure, reactive gas flow and RF-power. Investigations of microstructure and surface morphology were carried out with electron microscopy (SEM), atomic force microscopy (AFM) and X-ray diffraction techniques (XRD) and are described in more detail for TiO2-coatings. The individual columns with diameters between 100 and 500 nm were terminated by pyramid-shaped tips where the geometric forms of the pyramids were determined by the crystal system of the coating material. A power law was found for the dependance of the mean column diameter on coating thickness in qualitative agreement with phenomenological models for thin film growth. Both coating materials were deposited on steel tools and hot embossed into the surfaces of PMMA-clear-view screens. The resulting screen''s surface morphologies proved to be comparable to the anti-reflective surfaces of moth-eyes and also exhibited a pronounced decrease in reflectivity. [Copyright &y& Elsevier] – Name: AbstractSuppliedCopyright Label: Group: Ab Data: <i>Copyright of Surface & Coatings Technology is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.) |
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| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1016/j.surfcoat.2005.01.079 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 5 StartPage: 1088 Subjects: – SubjectFull: Thin films Type: general – SubjectFull: Atomic force microscopy Type: general – SubjectFull: Coating processes Type: general – SubjectFull: Surfaces (Technology) Type: general Titles: – TitleFull: Investigation of structured TiAlN- and TiO2-coatings with moth-eye-like surface morphologies Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Burmeister, F. – PersonEntity: Name: NameFull: Schäffer, E. – PersonEntity: Name: NameFull: Kleer, G. – PersonEntity: Name: NameFull: Döll, W. – PersonEntity: Name: NameFull: Bläsi, B. – PersonEntity: Name: NameFull: Gombert, A. IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 10 Text: Oct2005 Type: published Y: 2005 Identifiers: – Type: issn-print Value: 02578972 Numbering: – Type: volume Value: 200 – Type: issue Value: 1-4 Titles: – TitleFull: Surface & Coatings Technology Type: main |
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