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A 4-by-4 high impedance NbSi TES array for high resolution X-ray spectro-imaging.

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Title: A 4-by-4 high impedance NbSi TES array for high resolution X-ray spectro-imaging.
Authors: Criton, Benjamin1 (AUTHOR) benjamin.criton@cea.fr, Marnieros, Stefanos1,2 (AUTHOR) stefanos.marnieros@ijclab.in2p3.fr, Sauvageot, Jean-Luc1 (AUTHOR) jean-luc.sauvageot@cea.fr, de la Broïse, Xavier1 (AUTHOR) xavier.de-la-broise@cea.fr, Bergé, Laurent2 (AUTHOR) laurent.berge@ijclab.in2p3.fr
Source: Nuclear Instruments & Methods in Physics Research Section A. Jun2025, Vol. 1075, pN.PAG-N.PAG. 1p.
Subjects: Superconducting transitions, Heat conduction, Focal planes, Heat sinks, Heat capacity
Abstract: We conduct an R&D project on high impedance TES detectors aiming to minimise the focal plane power consumption while having high spectral and spatial resolutions. In this article we review the development of 4-by-4 Niobium–Silicon (NbSi) Transition-Edge-Sensor (TES) arrays. The 16 membrane pixels are suspended by thin (5 μ m thick) Silicon bridges that ensure electrical wiring and a weak thermal link to the heat sink. We fabricate these arrays on Silicon On Insulator (SOI) wafers with different pixel-to-substrate bridge lengths, widths, orientations and numbers to experimentally determine the Silicon heat conduction at 100 mK. We also design different NbSi TES meanders to measure the electron–phonon decoupling effect, the various heat capacities (Si, NbSi, absorber) and the slope of the superconducting transitions. These chips will help to better understand and control the physical parameters for future optimised developments. This constitutes, in addition with our 50 mK CMOS multiplexing ASIC and our 4 K HEMT-SiGe amplifier, a scaled-down prefiguration of an X-ray cryogenic detector chain for astrophysics. [ABSTRACT FROM AUTHOR]
Copyright of Nuclear Instruments & Methods in Physics Research Section A is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
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DbLabel: Engineering Source
An: 184265888
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  Data: A 4-by-4 high impedance NbSi TES array for high resolution X-ray spectro-imaging.
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  Data: <searchLink fieldCode="AR" term="%22Criton%2C+Benjamin%22">Criton, Benjamin</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> benjamin.criton@cea.fr</i><br /><searchLink fieldCode="AR" term="%22Marnieros%2C+Stefanos%22">Marnieros, Stefanos</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<i> stefanos.marnieros@ijclab.in2p3.fr</i><br /><searchLink fieldCode="AR" term="%22Sauvageot%2C+Jean-Luc%22">Sauvageot, Jean-Luc</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> jean-luc.sauvageot@cea.fr</i><br /><searchLink fieldCode="AR" term="%22de+la+Broïse%2C+Xavier%22">de la Broïse, Xavier</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> xavier.de-la-broise@cea.fr</i><br /><searchLink fieldCode="AR" term="%22Bergé%2C+Laurent%22">Bergé, Laurent</searchLink><relatesTo>2</relatesTo> (AUTHOR)<i> laurent.berge@ijclab.in2p3.fr</i>
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  Data: <searchLink fieldCode="JN" term="%22Nuclear+Instruments+%26+Methods+in+Physics+Research+Section+A%22">Nuclear Instruments & Methods in Physics Research Section A</searchLink>. Jun2025, Vol. 1075, pN.PAG-N.PAG. 1p.
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  Data: <searchLink fieldCode="DE" term="%22Superconducting+transitions%22">Superconducting transitions</searchLink><br /><searchLink fieldCode="DE" term="%22Heat+conduction%22">Heat conduction</searchLink><br /><searchLink fieldCode="DE" term="%22Focal+planes%22">Focal planes</searchLink><br /><searchLink fieldCode="DE" term="%22Heat+sinks%22">Heat sinks</searchLink><br /><searchLink fieldCode="DE" term="%22Heat+capacity%22">Heat capacity</searchLink>
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  Data: We conduct an R&D project on high impedance TES detectors aiming to minimise the focal plane power consumption while having high spectral and spatial resolutions. In this article we review the development of 4-by-4 Niobium–Silicon (NbSi) Transition-Edge-Sensor (TES) arrays. The 16 membrane pixels are suspended by thin (5 μ m thick) Silicon bridges that ensure electrical wiring and a weak thermal link to the heat sink. We fabricate these arrays on Silicon On Insulator (SOI) wafers with different pixel-to-substrate bridge lengths, widths, orientations and numbers to experimentally determine the Silicon heat conduction at 100 mK. We also design different NbSi TES meanders to measure the electron–phonon decoupling effect, the various heat capacities (Si, NbSi, absorber) and the slope of the superconducting transitions. These chips will help to better understand and control the physical parameters for future optimised developments. This constitutes, in addition with our 50 mK CMOS multiplexing ASIC and our 4 K HEMT-SiGe amplifier, a scaled-down prefiguration of an X-ray cryogenic detector chain for astrophysics. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Nuclear Instruments & Methods in Physics Research Section A is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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RecordInfo BibRecord:
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      – Type: doi
        Value: 10.1016/j.nima.2025.170369
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      – Code: eng
        Text: English
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        PageCount: 1
        StartPage: N.PAG
    Subjects:
      – SubjectFull: Superconducting transitions
        Type: general
      – SubjectFull: Heat conduction
        Type: general
      – SubjectFull: Focal planes
        Type: general
      – SubjectFull: Heat sinks
        Type: general
      – SubjectFull: Heat capacity
        Type: general
    Titles:
      – TitleFull: A 4-by-4 high impedance NbSi TES array for high resolution X-ray spectro-imaging.
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            NameFull: Criton, Benjamin
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            NameFull: Marnieros, Stefanos
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            NameFull: Sauvageot, Jean-Luc
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            NameFull: de la Broïse, Xavier
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            NameFull: Bergé, Laurent
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            – D: 01
              M: 06
              Text: Jun2025
              Type: published
              Y: 2025
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              Value: 1075
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