Toward Taper-Free Structures in Ultrashort Pulse Laser Ablation Using Liquid Crystal Spatial Light Modulators.
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| Title: | Toward Taper-Free Structures in Ultrashort Pulse Laser Ablation Using Liquid Crystal Spatial Light Modulators. |
|---|---|
| Authors: | Osbild, Martin1 martin.osbild@ilt.fraunhofer.de, Hesker, Mario2, Battermann, Moritz1, Gang Lu1, Haasler, Dennis1 |
| Source: | Journal of Laser Micro / Nanoengineering. Apr2025, Vol. 20 Issue 1, p16-21. 6p. |
| Subjects: | Ultrashort laser pulses, Spatial light modulators, Focal length, Laser ablation, Laser beam cutting, Ultra-short pulsed lasers |
| Abstract: | Conventional ultrashort pulse laser microstructuring or cutting is inherently prone to the generation of tapered walls. This effect can only be compensated for by means of a defined manipulation of the angle of incidence (AOI) of the focused beam. This study explores the feasibility of using liquid crystal on silicon spatial light modulators (SLM) to achieve vertical wall angles in laser ablation. In the proposed method, the raw beam is passed sequentially over two cascaded SLMs to create a parallel offset that results in an altered AOI on the workpiece. This offers capabilities beyond established solutions such as simultaneous beam splitting and shaping. In a first step, investigations on laser cutting of stainless steel sheets are carried out to analyze the wall angle as a function of the most influencing parameters. Results indicate a minimum AOI of 3° is essential for taper-free structures, which is respected in the optics design considerations for the double-SLM module. Furthermore, the tradeoff between optical efficiency and beam path length is quantitatively presented. Finally, recommendations for selecting the focal length of the f-theta lens and the scanning system are provided based on analytical calculations and optical simulations. [ABSTRACT FROM AUTHOR] |
| Copyright of Journal of Laser Micro / Nanoengineering is the property of Japan Laser Processing Society and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.) | |
| Database: | Engineering Source |
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| Header | DbId: egs DbLabel: Engineering Source An: 185337461 AccessLevel: 6 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| Items | – Name: Title Label: Title Group: Ti Data: Toward Taper-Free Structures in Ultrashort Pulse Laser Ablation Using Liquid Crystal Spatial Light Modulators. – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AR" term="%22Osbild%2C+Martin%22">Osbild, Martin</searchLink><relatesTo>1</relatesTo><i> martin.osbild@ilt.fraunhofer.de</i><br /><searchLink fieldCode="AR" term="%22Hesker%2C+Mario%22">Hesker, Mario</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AR" term="%22Battermann%2C+Moritz%22">Battermann, Moritz</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Gang+Lu%22">Gang Lu</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Haasler%2C+Dennis%22">Haasler, Dennis</searchLink><relatesTo>1</relatesTo> – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22Journal+of+Laser+Micro+%2F+Nanoengineering%22">Journal of Laser Micro / Nanoengineering</searchLink>. Apr2025, Vol. 20 Issue 1, p16-21. 6p. – Name: Subject Label: Subjects Group: Su Data: <searchLink fieldCode="DE" term="%22Ultrashort+laser+pulses%22">Ultrashort laser pulses</searchLink><br /><searchLink fieldCode="DE" term="%22Spatial+light+modulators%22">Spatial light modulators</searchLink><br /><searchLink fieldCode="DE" term="%22Focal+length%22">Focal length</searchLink><br /><searchLink fieldCode="DE" term="%22Laser+ablation%22">Laser ablation</searchLink><br /><searchLink fieldCode="DE" term="%22Laser+beam+cutting%22">Laser beam cutting</searchLink><br /><searchLink fieldCode="DE" term="%22Ultra-short+pulsed+lasers%22">Ultra-short pulsed lasers</searchLink> – Name: Abstract Label: Abstract Group: Ab Data: Conventional ultrashort pulse laser microstructuring or cutting is inherently prone to the generation of tapered walls. This effect can only be compensated for by means of a defined manipulation of the angle of incidence (AOI) of the focused beam. This study explores the feasibility of using liquid crystal on silicon spatial light modulators (SLM) to achieve vertical wall angles in laser ablation. In the proposed method, the raw beam is passed sequentially over two cascaded SLMs to create a parallel offset that results in an altered AOI on the workpiece. This offers capabilities beyond established solutions such as simultaneous beam splitting and shaping. In a first step, investigations on laser cutting of stainless steel sheets are carried out to analyze the wall angle as a function of the most influencing parameters. Results indicate a minimum AOI of 3° is essential for taper-free structures, which is respected in the optics design considerations for the double-SLM module. Furthermore, the tradeoff between optical efficiency and beam path length is quantitatively presented. Finally, recommendations for selecting the focal length of the f-theta lens and the scanning system are provided based on analytical calculations and optical simulations. [ABSTRACT FROM AUTHOR] – Name: AbstractSuppliedCopyright Label: Group: Ab Data: <i>Copyright of Journal of Laser Micro / Nanoengineering is the property of Japan Laser Processing Society and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.) |
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| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.2961/jlmn.2025.01.2003 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 6 StartPage: 16 Subjects: – SubjectFull: Ultrashort laser pulses Type: general – SubjectFull: Spatial light modulators Type: general – SubjectFull: Focal length Type: general – SubjectFull: Laser ablation Type: general – SubjectFull: Laser beam cutting Type: general – SubjectFull: Ultra-short pulsed lasers Type: general Titles: – TitleFull: Toward Taper-Free Structures in Ultrashort Pulse Laser Ablation Using Liquid Crystal Spatial Light Modulators. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Osbild, Martin – PersonEntity: Name: NameFull: Hesker, Mario – PersonEntity: Name: NameFull: Battermann, Moritz – PersonEntity: Name: NameFull: Gang Lu – PersonEntity: Name: NameFull: Haasler, Dennis IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 04 Text: Apr2025 Type: published Y: 2025 Identifiers: – Type: issn-print Value: 18800688 Numbering: – Type: volume Value: 20 – Type: issue Value: 1 Titles: – TitleFull: Journal of Laser Micro / Nanoengineering Type: main |
| ResultId | 1 |
