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Femtosecond Laser-Based direct fabrication of High-Density convex microlens array on silicon substrates for advanced optoelectronic applications.

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Title: Femtosecond Laser-Based direct fabrication of High-Density convex microlens array on silicon substrates for advanced optoelectronic applications.
Authors: Zhao, Bing1 (AUTHOR), Hu, Jinbing2 (AUTHOR), Wang, Guorong1 (AUTHOR), Lun, Yinghao1 (AUTHOR), Du, Wenhan1 (AUTHOR), Zhao, Xiaona1 (AUTHOR) xiaona.zhao@whu.edu.cn, Wang, Xuan1 (AUTHOR)
Source: Optics & Laser Technology. Nov2025, Vol. 189, pN.PAG-N.PAG. 1p.
Subjects: Infrared array detectors, Bessel beams, Infrared detectors, Focal planes, Focal length
Abstract: A novel method for fabricating ultrafine, large-area convex microlens array (MLA) on silicon substrates is demonstrated by combining femtosecond laser processing with subsequent wet etching. The resulting MLAs features square aperture with a radius as small as 10 μm and an ultra-short focal length of 30 μm, specifically designed to maximize light concentration onto the sensors of HgCdTe infrared detectors. The square aperture geometry ensures uniform focusing of incident infrared light while preventing sensor damage from excessive energy concentration and effectively utilizing dead zones typically present in circular-aperture designs. Bessel beam was chosen for processing the MLA due to its non-diffraction properties and superior capability compared to the Gaussian beam in shaping microstructures with large depth-to-diameter ratios. The processed MLA enables to collect over 88 % of infrared light onto the infrared focal plane sensors, resulting in nearly a twofold enhancement in effective utilization efficiency (EUE) for the HgCdTe infrared detector. The silicon substrates, after being processed and fully equipped with MLA on their surfaces, are capable of gathering more than 88 % of infrared light and directing it onto the infrared focal plane sensors, resulting in a nearly twofold improvement in the EUE of the HgCdTe infrared detector. These results demonstrate an effective approach for fabricating ultra-small microstructures and hold significant promise for enhancing the energy efficiency of infrared detection systems. [ABSTRACT FROM AUTHOR]
Copyright of Optics & Laser Technology is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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Header DbId: egs
DbLabel: Engineering Source
An: 185622291
AccessLevel: 6
PubType: Academic Journal
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  Label: Title
  Group: Ti
  Data: Femtosecond Laser-Based direct fabrication of High-Density convex microlens array on silicon substrates for advanced optoelectronic applications.
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  Data: <searchLink fieldCode="AR" term="%22Zhao%2C+Bing%22">Zhao, Bing</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Hu%2C+Jinbing%22">Hu, Jinbing</searchLink><relatesTo>2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Wang%2C+Guorong%22">Wang, Guorong</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Lun%2C+Yinghao%22">Lun, Yinghao</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Du%2C+Wenhan%22">Du, Wenhan</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Zhao%2C+Xiaona%22">Zhao, Xiaona</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> xiaona.zhao@whu.edu.cn</i><br /><searchLink fieldCode="AR" term="%22Wang%2C+Xuan%22">Wang, Xuan</searchLink><relatesTo>1</relatesTo> (AUTHOR)
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  Data: <searchLink fieldCode="JN" term="%22Optics+%26+Laser+Technology%22">Optics & Laser Technology</searchLink>. Nov2025, Vol. 189, pN.PAG-N.PAG. 1p.
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  Data: <searchLink fieldCode="DE" term="%22Infrared+array+detectors%22">Infrared array detectors</searchLink><br /><searchLink fieldCode="DE" term="%22Bessel+beams%22">Bessel beams</searchLink><br /><searchLink fieldCode="DE" term="%22Infrared+detectors%22">Infrared detectors</searchLink><br /><searchLink fieldCode="DE" term="%22Focal+planes%22">Focal planes</searchLink><br /><searchLink fieldCode="DE" term="%22Focal+length%22">Focal length</searchLink>
– Name: Abstract
  Label: Abstract
  Group: Ab
  Data: A novel method for fabricating ultrafine, large-area convex microlens array (MLA) on silicon substrates is demonstrated by combining femtosecond laser processing with subsequent wet etching. The resulting MLAs features square aperture with a radius as small as 10 μm and an ultra-short focal length of 30 μm, specifically designed to maximize light concentration onto the sensors of HgCdTe infrared detectors. The square aperture geometry ensures uniform focusing of incident infrared light while preventing sensor damage from excessive energy concentration and effectively utilizing dead zones typically present in circular-aperture designs. Bessel beam was chosen for processing the MLA due to its non-diffraction properties and superior capability compared to the Gaussian beam in shaping microstructures with large depth-to-diameter ratios. The processed MLA enables to collect over 88 % of infrared light onto the infrared focal plane sensors, resulting in nearly a twofold enhancement in effective utilization efficiency (EUE) for the HgCdTe infrared detector. The silicon substrates, after being processed and fully equipped with MLA on their surfaces, are capable of gathering more than 88 % of infrared light and directing it onto the infrared focal plane sensors, resulting in a nearly twofold improvement in the EUE of the HgCdTe infrared detector. These results demonstrate an effective approach for fabricating ultra-small microstructures and hold significant promise for enhancing the energy efficiency of infrared detection systems. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Optics & Laser Technology is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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RecordInfo BibRecord:
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      – Type: doi
        Value: 10.1016/j.optlastec.2025.113179
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      – Code: eng
        Text: English
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        PageCount: 1
        StartPage: N.PAG
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      – SubjectFull: Infrared array detectors
        Type: general
      – SubjectFull: Bessel beams
        Type: general
      – SubjectFull: Infrared detectors
        Type: general
      – SubjectFull: Focal planes
        Type: general
      – SubjectFull: Focal length
        Type: general
    Titles:
      – TitleFull: Femtosecond Laser-Based direct fabrication of High-Density convex microlens array on silicon substrates for advanced optoelectronic applications.
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  BibRelationships:
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          Name:
            NameFull: Zhao, Bing
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            NameFull: Hu, Jinbing
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            NameFull: Wang, Guorong
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            NameFull: Lun, Yinghao
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            NameFull: Du, Wenhan
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            NameFull: Zhao, Xiaona
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            NameFull: Wang, Xuan
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            – D: 01
              M: 11
              Text: Nov2025
              Type: published
              Y: 2025
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              Value: 189
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            – TitleFull: Optics & Laser Technology
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