Femtosecond Laser-Based direct fabrication of High-Density convex microlens array on silicon substrates for advanced optoelectronic applications. - Zhao, Bing; Hu, Jinbing; Wang, Guorong; Lun, Yinghao; Du, Wenhan; Zhao, Xiaona; Wang, Xuan (Optics & Laser Technology, 2025)